Plasma processing is used to fabricate super hydrophilic or super hydrophobic polymeric surfaces by means of O2 plasma etching of two organic polymers, namely, poly(methyl methacrylate) (PMMA) and poly(ether ether ketone) (PEEK); a C4F8 plasma deposition follows O2 plasma etching, if surface hydrophobization is desired. We demonstrate high aspect ratio pillars with height ranging from 16 nm to several micrometers depending on the processing time, and contact angle (CA) close to 0 degrees after O2-plasma treatment or CA of 153 degrees (with CA hysteresis lower than 5 degrees) after fluorocarbon deposition. Super hydrophobic surfaces are robust and stable in time; in addition, aging of super hydrophilic surfaces is significantly retarded because of the beneficial effect of the nanotextured topography. The mechanisms responsible for the plasma-induced PMMA and PEEK surface nanotexturing are unveiled through intelligent experiments involving intentional modification of the reactor wall material and X-ray photoelectron spectroscopy, which is also used to study the surface chemical modification in the plasma. We prove that control of plasma nanotexture can be achieved by carefully choosing the reactor wall material.

Studies on structure and electronic properties of amorphous nitrogenated carbon films prepared in dual electron cyclotron resonance–radio frequency plasma from a mixture of methane and nitrogen are presently reported. These films are characterized by Fourier transform infrared spectroscopy (FTIR), Raman spectroscopy, x-ray photoemission spectroscopy (XPS), ultraviolet photoemission spectroscopy (UPS), electrical conductivity measurement, and optical absorption spectroscopy. Symmetry breaking of aromatic rings are at a very small amount of nitrogen incorporation is understood from FTIR spectra. The relative contribution of C=N and C–N bonds is found to change with the variation of the nitrogen content in the samples, which shows a similar trend with the shift of the G peak to a higher wave number and the increase of the ID/IG ratio. From decomposition of XPS C 1s and N 1s peaks a three-phase model of CN bonds is proposed. UPS valence band spectra obtained by using a Helium II source, are decomposed into p-π, p-σ, 2s bands and a mixture of s-p band. The intensity of p-π band increases as a function of nitrogen concentration, confirming the increase of sp2 bonds in the samples. An enhancement of the room temperature electrical conductivity and a decrease of the optical gap are observed with the addition of nitrogen in the films. The effect of nitrogen doping in carbon films is also emphasized. Our analyses establish an interrelationship between the microstructure and electronic structure of nitrogenated carbon films, which helps to understand the change in electronic properties of the carbon films due to a low amount of nitrogen incorporation.

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3 pagesInternational audienceThe oxyfluorinated silicon passivation layer created during various cryoetching processes is of interest in order to improve high aspect ratio profiles. In this work, the desorption of a SiOxFy layer obtained in an overpassivating SF6 /O2 regime was investigated during the wafer warm-up from the cryogenic temperature to room temperature. An in situ x-ray photoelectron spectroscopy XPS device is used in order to probe the top-surface layer and understand the desorption mechanism. A new mechanism can be proposed using the evolution of fluorine, oxygen, silicon, and carbon contributions evidenced by XPS

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In this paper we describe the lithographic behavior and related material properties of a new class of chemically amplified, positive tone, silicon-containing methacrylate photoresists incorporating the polyhedral oligomeric silsesquioxane (POSS) group as the etch-resistant component. POSS-bearing monomers were copolymerized with methacrylic acid (MA), tertbutyl methacrylate (TBMA), tert-butyl trifluoro methacrylate (TBTFMA), itaconic anhydride (IA), and 2-(trifluoromethyl) acrylic acid (TFMA), in various compositions. A perfluorooctylsulfonate-based photoacid generator (PAG) was used to deprotect TBMA (or TBTFMA) to base soluble carboxylic acid by heating after exposure. XPS and angular XPS analysis were used to examine possible surface segregation phenomena. It was proven that POSS surface enrichment occurs for the POSS-TBMA copolymers while surface segregation may be reduced if suitable additional resist components are selected. The POSS-based resists were studied for 157-nm lithographic applications and found to have high sensitivity (<10 mJ/cm 2 under open field exposure), no silicon outgassing, and sub-100-nm resolution capabilities. Ninety nanometer patterns in 100-nm thick films were resolved. At present, their absorbance is high (∼4 µm -1 ) for single-layer lithographic applications at 157 nm; however, high etch resistance in oxygen plasma makes them suitable for bilayer schemes.

Abstract:The primary objective of this study is the development of transparent thin film materials in the IR enabling strong infrared absorption of organic compounds in the vicinity of metal nanoparticles by the surface plasmon effect. For developing these optical micro-sensors, heterostructures combining gold nanoparticles and chalcogenide planar waveguides are fabricated and adequately characterized. Single As 2 S 3 and Ge 25 Sb 10 Se 65 amorphous chalcogenide thin films are prepared by radiofrequency magnetron sputtering. For the fabrication of gold nanoparticles on a chalcogenide planar waveguide, direct current sputtering is employed. Fabricated single layers or hetero-structures are characterized using various techniques to investigate the influence of deposition parameters. The nanoparticles of gold are functionalized by a self-assembled monolayer of 4-nitrothiophenol. Finally, the surface enhanced infrared absorption spectra of 4-nitrothiophenol self-assembled on fabricated Au/Ge-Sb-Se thin films hetero-structures are measured and analyzed. This optical component presents a ~24 enhancement factor for the detection of NO 2 symmetric stretching vibration band of 4-nitrothiophenol at 1336 cm −1 . 232-239 (1999). 19. L. Tichý, H. Ticha, P. Nagels, R. Callaerts, R. Mertens, and M. Vlcek, "Optical properties of amorphous As-Se and Ge-As-Se thin films," Mater. Lett. 39(2), 122-128 (1999). 20. J. Charrier, M. L. Anne, H. Lhermite, V. Nazabal, J. P. Guin, F. Charpentier, T. Jouan, F. Henrio, D. Bosc, and J. L. Adam, "Sulphide GaxGe25-xSb10S65(x=0,5) sputtered films: Fabrication and optical characterizations of planar and rib optical waveguides," J. Appl.

International audienceChalcogenide thin films (GeSe2)100 − x(Sb2Se3)x (with x = 10 and 50) were deposited by Radio-frequency (RF) magnetron sputtering. In order to study the impact of Ar pressure on the structure and the composition of selenide thin films structural properties of thin films and targets were investigated by means of Raman scattering spectroscopy and X-ray photoelectron spectroscopy (XPS). Under low pressure (5 · 10− 3 mbar), the increase of wrong bonds like Ge(Sb)-Ge(Sb) was confirmed by Raman and also XPS for both composition. The observed structural changes with Ar pressure are linked with modification of the composition of the selenide films analyzed by EDS and XPS. Furthermore for higher Ar pressure (5 · 10− 2 mbar), RF sputtered thin film and target structure present a great similarity. These differences driven by Ar pressure modification are probably related to distinctive sputtering rate and mean free path of the particles ejected from target for the different Ar pressure