Chang Woo Song scite author profile

In this study, we investigated Ti-doped ITO films formed through ionized physical vapor deposition (IPVD) using inductively coupled plasma (ICP). Ti-doped ITO thin films showed an enhanced mobility with ICP power; owing to the improved crystallinity, and the sheet resistance of the Ti-doped ITO (30 nm) largely decreased from 295.1 to 134.5 ohm/sq, even during at room temperature. Therefore, IPVD technology offers a useful tool for transparent electrodes with a large area window-unified touch-screen panel.

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Ultralow-aspect-ratio micropore sensor for a particle translocation: Critical role of the access region

Ryu

Choi

Jeon

et al. 2019

Sensors and Actuators B: Chemical

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Chang Woo Song

Discovery of crystal structure–stability correlation in iridates for oxygen evolution electrocatalysis in acid

Dissolution-Induced Surface Roughening and Oxygen Evolution Electrocatalysis of Alkaline-Earth Iridates in Acid

Effect of Inductively Coupled Plasma on the Structural and Electrical Properties of Ti-Doped ITO Films Formed by IPVD

Ultralow-aspect-ratio micropore sensor for a particle translocation: Critical role of the access region

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