This paper presents microwave capacitive RF-MEMS switches based on a novel simplified fabrication process. The devices are fabricated on a silicon substrate using only one metallisation layer. For the capacitive coupling of the switch, an implanted conductive region and thermally grown silicon oxide is used instead of a second metal layer and an additional dielectric layer. In addition, the formerly used bimorph metallisation layer is replaced by a single-metallisation concept, which results in an increased temperature range of operation. The simplified process as well as the switch topology used lead to high performance and highly reliable RF-MEMS switches.RF-measurement results are presented of Ku-and K-band series switches and a Ka-band parallel switch with low insertion losses between -0.2dB and -0.3dB and isolation of e.g. -17dB at 30GHz.
Abstract-This paper describes the concept and the development of key components of a novel multiple-beam antenna for satellite applications. The antenna is designed to be used in a transparent high-rate data relay system that links several low earth orbit (LEO) satellites to a single ground station via a satellite positioned on a geostationary orbit (GEO). The proposed antenna is based on the concept of an array-fed reflector. The antenna can track LEO satellites by switching between different subarrays of a bigger multifeed array using a reconfigurable switch matrix based on radio frequency micro-electromechanical system (RF MEMS) switches. The radiation characteristic of the antenna is further improved by combining digital beamforming with beam switching. In order to validate the proposed antenna concept and to show its suitability for space applications a demonstrator has been built. Measurements of the antenna's key components and of the demonstration system are given.
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