2006 European Microwave Conference 2006
DOI: 10.1109/eumc.2006.281477
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Simplified RF-MEMS Switches Using Implanted Conductors and Thermal Oxide

Abstract: This paper presents microwave capacitive RF-MEMS switches based on a novel simplified fabrication process. The devices are fabricated on a silicon substrate using only one metallisation layer. For the capacitive coupling of the switch, an implanted conductive region and thermally grown silicon oxide is used instead of a second metal layer and an additional dielectric layer. In addition, the formerly used bimorph metallisation layer is replaced by a single-metallisation concept, which results in an increased te… Show more

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Cited by 13 publications
(11 citation statements)
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“…In consequence, at this point of time, only one single company produces RF MEMS switches which work beyond 26 GHz and the switches are offered only in SPDT configuration. For this project, a technology which is being developed by EADS Innovation Works was selected [13] (see Fig. 7) because of its high concept-inherent reliability and temperature stability, the demonstrated RF-performance parameters and the design flexibility offered.…”
Section: Switch Matrixmentioning
confidence: 99%
See 1 more Smart Citation
“…In consequence, at this point of time, only one single company produces RF MEMS switches which work beyond 26 GHz and the switches are offered only in SPDT configuration. For this project, a technology which is being developed by EADS Innovation Works was selected [13] (see Fig. 7) because of its high concept-inherent reliability and temperature stability, the demonstrated RF-performance parameters and the design flexibility offered.…”
Section: Switch Matrixmentioning
confidence: 99%
“…This paper provides an overview of the whole concept of the satellite multiple-beam antenna for high-rate data relays, the development of its key components and a demonstration system built to validate the proposed design. Some parts of the work presented here were already published in [9][10][11][12][13][14][15]. The next section presents the concept of the proposed antenna for high-rate data relays that combines beam switching with digital beamforming.…”
Section: Introductionmentioning
confidence: 99%
“…The movable rings behave, thus, similarly to cantilever‐type MEMS. This principle of electrical actuation through the silicon substrate has already been used in RF‐MEMS switches [47–49] and extended to reconfigurable antennas and filters [50].…”
Section: Applications Of Split Ring Based Linesmentioning
confidence: 99%
“…Figure 1 depicts a frequency-agile multi-mode PA with RF-MEMS-based M 3 Ns, for which the EADS in-house silicon-based RF-MEMS technology [5] is used. Such applications can feature specifications, which cannot be realized with a single amplifier module.…”
Section: Introductionmentioning
confidence: 99%