Gas transport in narrow air channels (length-to-height ratio 1 mm/1 μm) is characterized by work function detectors like hybrid suspended gate field effect transistors (HSGFETs) with sensitive areas located in the middle of the channel. A thin platinum layer covered one side of the channel. In order to separate the influence of the size of the channel structure on the gas exchange Kelvin probe measurements with platinum coated reference electrodes were carried out simultaneously. For the HSGFET we have observed time lags and suppressions of reactions, which indicate a strong adsorption dependence of gas exchange for the investigated testing gas mixture of hydrogen in nitrogen or synthetic air, respectively. The results are discussed in relation to common models for the flow in thin capillaries. We also point out the special features of narrow air channels for investigating adsorption related phenomena and for improving chemical sensor characteristics by incorporating them into small air gaps.
Laser or elecrricul blow Fuse 3LM -6LM dual damasene copper + MIM cupucirar (ILD= Si02 or FSG) CoSi, gate/diffusion + non-silicided gute/d@usion resistors High-speed + Low Power + 3.3V I/O + Anulog CMOS (low Vt) (high Vt) ( thick gate ox.) Conventional STI None or sroruge cupuchrfor eDRAM or de-coupling cup. non-Epi vs. EpiTABLE I EPI VS. NON EPI FOR DIFFERENT APPLICATIONSA 0.18pm high performance / low power technology platform is described which allows 'system on a chip integration' for a broad spectrum of products. Based on a generic digital process (1) additional modules can be added in a modularand cost effective-manner for mixed signal as well as for eDRAM applications offering a maximum of flexibility for product designers. For mixed signal applications a precision metal-insulator-metal capacitor (MIMCAP) was developed. This is for the first time a realization of a metal-insulatormetal capacitor in a copper dual damascene metallization scheme.
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