Evaluation of gas mixtures with different sensitive layers incorporated in hybrid FET structures

Leu, Ming‐Taun; Doll, Theodor; Flietner, B.; Lechner, J.; Eisele, I.

doi:10.1016/0925-4005(93)01128-q

Cited by 12 publications

(4 citation statements)

References 2 publications

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“…This kind of gas sensors can detect many reducing gases, such as H 2 and VOCs. A hybrid FET-type sensor was designed using Ga 2 O 3 as the sensitive layer and the measured variation of the work function indicated a multiple response to H 2 , NH 3 , and NO 2 [ 206 , 207 , 208 ]. In their work, an analytic theoretical model was proposed to explain the inner sensing mechanism.…”

Section: Ga 2 O 3 -Based Gas Se...mentioning

confidence: 99%

Gallium Oxide for Gas Sensor Applications: A Comprehensive Review

Zhu

et al. 2022

Materials

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Ga2O3 has emerged as a promising ultrawide bandgap semiconductor for numerous device applications owing to its excellent material properties. In this paper, we present a comprehensive review on major advances achieved over the past thirty years in the field of Ga2O3-based gas sensors. We begin with a brief introduction of the polymorphs and basic electric properties of Ga2O3. Next, we provide an overview of the typical preparation methods for the fabrication of Ga2O3-sensing material developed so far. Then, we will concentrate our discussion on the state-of-the-art Ga2O3-based gas sensor devices and put an emphasis on seven sophisticated strategies to improve their gas-sensing performance in terms of material engineering and device optimization. Finally, we give some concluding remarks and put forward some suggestions, including (i) construction of hybrid structures with two-dimensional materials and organic polymers, (ii) combination with density functional theoretical calculations and machine learning, and (iii) development of optical sensors using the characteristic optical spectra for the future development of novel Ga2O3-based gas sensors.

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Section: Ga 2 O 3 -Based Gas Se...mentioning

confidence: 99%

Gallium Oxide for Gas Sensor Applications: A Comprehensive Review

Zhu

et al. 2022

Materials

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“…A modified building setup in SGFET sensors (suspended Gate FET) includes an air gap in order that the gas can reach the sensing gate surface directly. Such SGFET haven been shown to operate successfully at room temperature for the detection of H 2 , NH 3 , NOx, and CO [75].…”

Section: State Of the Art Of Field Effect Transistor (Fet) Type Sensorsmentioning

confidence: 99%

State of the Art of Chemosensors in a Biomedical Context

et al. 2022

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Healthcare is undergoing large transformations, and it is imperative to leverage new technologies to support the advent of personalized medicine and disease prevention. It is now well accepted that the levels of certain biological molecules found in blood and other bodily fluids, as well as in exhaled breath, are an indication of the onset of many human diseases and reflect the health status of the person. Blood, urine, sweat, or saliva biomarkers can therefore serve in early diagnosis of diseases such as cancer, but also in monitoring disease progression, detecting metabolic disfunctions, and predicting response to a given therapy. For most point-of-care sensors, the requirement that patients themselves can use and apply them is crucial not only regarding the diagnostic part, but also at the sample collection level. This has stimulated the development of such diagnostic approaches for the non-invasive analysis of disease-relevant analytes. Considering these timely efforts, this review article focuses on novel, sensitive, and selective sensing systems for the detection of different endogenous target biomarkers in bodily fluids as well as in exhaled breath, which are associated with human diseases.

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“…The difference in the set-up to the Pd-gate FET is the air gap between channel isolation and the gate allowing direct gas access. Besides Janata [27] who basically invented this approach and used monolithic bulk micro machined devices, the pioneers in the construction of such a type of set-up were Eisele and Doll [28,29], who used a hybrid approach with one part being a gateless FET and the other a substrate equipped with a sensing film, both brought together to form a gas sensor. To make such things industrially usable, Siemens developed a polymer flip-chip variant of this device that allows precise mounting as well as the usage of low-processing temperatures [30].…”

Section: Gas Sensors Based On Suspended Gate Fetsmentioning

confidence: 99%

Advances in application potential of adsorptive-type solid state gas sensors: high-temperature semiconducting oxides and ambient temperature GasFET devices

Fleischer

2008

Meas. Sci. Technol.

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This paper reviews some scientific considerations about the underlying material properties and the detailed functional principle of two important types of solid state gas sensors. This is used to predict the application potential of these sensor technologies. The classical methodology to use resistance readout of heated semiconducting metal oxides is a straightforward approach to get robust sensors that are simple in design. The usage of materials that are operated at higher temperatures opens up the way for improvements; due to a change in the mechanism of electrical conductivity, better reproducibility and stability of the electrical properties can be attained. The high operation temperatures also lead to changes in the surface reactions with the gases that allow for quicker equilibration times. The next step is taken when devices are used that are based on the readout of the work function of the sensing materials. Suspended gate FETs here serve as the transducer structures. Surface properties are directly used here, which facilitates the preparation of sensing materials. The sensors can be used with a wide range of sensing materials, allowing the development of receptor materials that optimally fit the target gases. Functional improvements include enhanced selectivity and detection of a wider range of gases. These devices may work at room temperature with little energy required for running them and additionally allow direct access to the structure of the analyte molecule without thermal decomposition.

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Evaluation of gas mixtures with different sensitive layers incorporated in hybrid FET structures

Cited by 12 publications

References 2 publications

Gallium Oxide for Gas Sensor Applications: A Comprehensive Review

Gallium Oxide for Gas Sensor Applications: A Comprehensive Review

State of the Art of Chemosensors in a Biomedical Context

Advances in application potential of adsorptive-type solid state gas sensors: high-temperature semiconducting oxides and ambient temperature GasFET devices

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