The review will describe the various scanning probe microscopy tips and cantilevers used today for scanning force microscopy and magnetic force microscopy. Work undertaken to quantify the properties of cantilevers and tips, e.g. shape and radius, is reviewed together with an overview of the various tip–sample interactions that affect dimensional measurements.

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Six European National Measurement Institutes (NMIs) have joined forces within the European Metrology Research Programme funded project NANOTRACE to develop the next generation of optical interferometers having a target uncertainty of 10 pm. These are needed for NMIs to provide improved traceable dimensional metrology that can be disseminated to the wider nanotechnology community, thereby supporting the growth in nanotechnology. Several approaches were followed in order to develop the interferometers. This paper briefly describes the different interferometers developed by the various partners and presents the results of a comparison of performance of the optical interferometers using an x-ray interferometer to generate traceable reference displacements.

Scanning probe microscopes, in particular the atomic force microscope (AFM), have developed into sophisticated instruments that, throughout the world, are no longer used just for imaging, but for quantitative measurements. A role of the national measurement institutes has been to provide traceable metrology for these instruments. This paper presents a brief overview as to how this has been achieved, highlights the future requirements for metrology to support developments in AFM technology and describes work in progress to meet this need.

The requirement for calibrating transducers having subnanometre displacement sensitivities stimulated the development of an instrument in which the displacement is measured by a combination of optical and X-ray interferometry. The need to combine both types of interferometry arises from the fact that optical interferometry enables displacements corresponding to whole numbers of optical fringes to be measured very precisely, but subdivision of an optical fringe may give rise to errors that are significant at the subnanometre level. The X-ray interferometer is used to subdivide the optical fringes. Traceability to the meter is achieved via traceable calibrations of the lattice parameter of silicon and of the laser frequency. Polarization encoding and phase modulation allow the optical interferometer to be precisely set on a specific position of the interference fringe-the null point setting. The null point settings in the interference fringe field correspond to dark or bright hinges. Null measurement ensures maximum possible noise rejection. However, polarization encoding makes the interferometer nonlinear, but all nonlinearity effects are effectively zero at the fringe set point. The X-ray interferometer provides the means for linear subdivision of optical fringes. Each X-ray fringe corresponds to a displacement that is equal to the lattice parameter of silicon, which is ca. 0.19 nm for the (220) lattice planes. For displacements up to 1 mu m the measurement uncertainties at 95% confidence level are +/-30 pm, and for displacements up to 100 mu m and 1 mm the uncertainties are +/-35 and +/-170 pm, respectively. Important features of the instrument, which is located at the National Physical Laboratory, are the silicon monolith interferometer that both diffracts X-rays and forms part of the optical interferometer, a totally reflecting parabolic collimator for enhancing the usable X-ray flux and the servo-control for the interferometers

The PTB developed a new optical heterodyne interferometer in the context of the European joint research project ‘Nanotrace’. A new optical concept using plane-parallel plates and spatially separated input beams to minimize the periodic nonlinearities was realized. Furthermore, the interferometer has the resolution of a double-path interferometer, compensates for possible angle variations between the mirrors and the interferometer optics and offers a minimal path difference between the reference and the measurement arm. Additionally, a new heterodyne phase evaluation based on an analogue to digital converter board with embedded field programmable gate arrays was developed, providing a high-resolving capability in the single-digit picometre range. The nonlinearities were characterized by a comparison with an x-ray interferometer, over a measurement range of 2.2 periods of the optical interferometer. Assuming an error-free x-ray interferometer, the nonlinearities are considered to be the deviation of the measured displacement from a best-fit line. For the proposed interferometer, nonlinearities smaller than ±10 pm were observed without any quadrature fringe correction.

The x-ray interferometer from the combined optical and x-ray interferometer (COXI) facility at NPL has been used to investigate the performance of the NPL Jamin Differential Plane Mirror Interferometer when it is fitted with stabilized and unstabilized lasers. This Jamin interferometer employs a common path design using a double pass configuration and one fringe is realized by a displacement of 158 nm between its two plane mirror retroreflectors. Displacements over ranges of several optical fringes were measured simultaneously using the COXI x-ray interferometer and the Jamin interferometer and the results were compared. In order to realize the highest measurement accuracy from the Jamin interferometer, the air paths were shielded to prevent effects from air turbulence and electrical signals generated by the photodetectors were analysed and corrected using an optimizing routine in order to subdivide the optical fringes accurately. When an unstabilized laser was used the maximum peak-to-peak difference between the two interferometers was 80 pm, compared with 20 pm when the stabilized laser was used.

Progress in whole-genome sequencing using short-read (e.g., <150 bp), next-generation sequencing technologies has reinvigorated interest in high-resolution physical mapping to fill technical gaps that are not well addressed by sequencing. Here, we report two technical advances in DNA nanotechnology and single-molecule genomics: (1) we describe a labeling technique (CRISPR-Cas9 nanoparticles) for high-speed AFM-based physical mapping of DNA and (2) the first successful demonstration of using DVD optics to image DNA molecules with high-speed AFM. As a proof of principle, we used this new “nanomapping” method to detect and map precisely BCL2–IGH translocations present in lymph node biopsies of follicular lymphoma patents. This HS-AFM “nanomapping” technique can be complementary to both sequencing and other physical mapping approaches.