2006
DOI: 10.1016/j.cirp.2006.10.010
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Advances in Scanning Force Microscopy for Dimensional Metrology

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Cited by 117 publications
(81 citation statements)
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“…Besides, the high vacuum and conductive coatings required for SEM is no longer compulsory in SPM. What makes SPM appealing for biomanufacturing is that non-contact mode permits the measurement of live biological specimens with sensitive surfaces in the presence of hydration or fluid [34,143]. Moreover, AFM can be used to yield data on the viscoelasticity of biomolecular layers on biomaterials [145].…”
Section: Scanning Probe Microscopymentioning
confidence: 99%
See 1 more Smart Citation
“…Besides, the high vacuum and conductive coatings required for SEM is no longer compulsory in SPM. What makes SPM appealing for biomanufacturing is that non-contact mode permits the measurement of live biological specimens with sensitive surfaces in the presence of hydration or fluid [34,143]. Moreover, AFM can be used to yield data on the viscoelasticity of biomolecular layers on biomaterials [145].…”
Section: Scanning Probe Microscopymentioning
confidence: 99%
“…Scanning probe microscopy (SPM) is a favoured technique in observing atomic surface structures within an extremely narrow region [143]. Typical representatives of SPM include atomic force microscopy (AFM) and scanning tunnelling microscopy (STM).…”
Section: Scanning Probe Microscopymentioning
confidence: 99%
“…Scanning probe microscopy techniques, particularly AFM, provide the ultimate in terms of lateral resolution. These techniques are notoriously difficult to apply and are severely limited in terms of speed/range/tip wear [13].…”
Section: (B) State Of the Artmentioning
confidence: 99%
“…In the XRR method, the recorded diffraction peaks are correlated with the thickness of the examined layer. The other often used methods are: scanning force microscopy [8], atomic force microscopy [9] and ellipsometry [10].…”
Section: Theory Concerning Measurement Of Nanolayer Thicknessmentioning
confidence: 99%