Precision surface measurement

Abstract

Surface size, geometry and texture are some of the most influential subjects in the fields of precision and ultra-precision engineering, defining the functional interface through which emerging products operate. Next-generation products demand super-smooth surfaces, freeform geometries or even deterministically introduced microstructures to provide functional performance. Technological progress using these surfaces types is possible only if the associated manufacturing processes are rigorously controlled and the surfaces are measurable. Metrology for advanced surfaces is not established. The current state of the art is challenged in respect to (i) surface characteristics, extremity of size, ultra precision, quality, geometric complexity, or combinations of these aspects, and (ii) measurement technology for the manufacturing environment, in particular, online, non-contact, high speed, ease of use, small footprint and robustness. This study addresses the challenges in this subject area and discusses some fundaments and principles derived from interdisciplinary research. The combination of these aspects is enabling the creation of manufacturing-environment-based measurement technology. This is expected to facilitate advanced surface manufacture over a wide range of sectors, including large science programmes and high-technology engineering.

Application of the HHT Method to the Non-contact Thickness Measurement of an Axially Moving Thin Plate

“…Because of existing relative motions or vibrations in the measuring process, multi-sensor techniques and corresponding algorithms integrated into the manufacturing environment should be good choices to obtain precise measurement results [7][8][9][10][11].…”

Calibration of an interferometric on-machine probing system on an ultra-precision turning machine

“…Surface measurement is fundamental in providing valuable information to control the surface generation process and improving machining accuracy [2]. In order to increase the measurement efficiency in advanced manufacturing, a shift in the approach of metrology from offline lab based solutions towards the use of metrology upon manufacturing platforms is urgently needed [3][4][5]. The advantage of on-machine metrology is the consistent coordinate system between machining and measurement process, which avoids the errors caused by re-positioning workpieces and utilizes the machine axes to extend the measuring range [6].…”

Development and Application of Interferometric On-Machine Surface Measurement for Ultraprecision Turning Process

“…Thus the process of surface metrology and compensation are indispensable in the further development of fundamental techniques for better surface accuracy [6]. Shifting the approach of metrology from offline, lab based solutions towards the use of metrology within manufacturing platforms is urgently demanded to further enhance measurement efficiency and smart manufacturing [7][8][9]. On-machine surface measurement (OMSM) can avoid the errors caused by repositioning workpieces, use the machine axes to extend the measuring range and improve the measuring efficiency [10,11].…”