Aspects of scanning force microscope probes and their effects on dimensional measurement

Abstract

The review will describe the various scanning probe microscopy tips and cantilevers used today for scanning force microscopy and magnetic force microscopy. Work undertaken to quantify the properties of cantilevers and tips, e.g. shape and radius, is reviewed together with an overview of the various tip–sample interactions that affect dimensional measurements.

Measurement of the permittivity and loss of high-loss materials using a Near-Field Scanning Microwave Microscope

“…This is obtained by detection of the shear force when the probe tip is subject to smallamplitude vibrations (and is therefore distinct from 'contact mode' in AFM systems in which the tip touches the surface). A highly-sensitive detector is used to obtain a voltage that varies monotonically with the shear-force interaction [20][21] [22] between the tip and specimen. This is connected to the piezo-controller (PI E-710), which has built-in closed-loop control circuits that can be used to maintain contact mode.…”

“…This is connected to the piezo-controller (PI E-710), which has built-in closed-loop control circuits that can be used to maintain contact mode. In previously-reported work [23] a tuning fork was used for detecting shear force, however a method based on optical beam deflection [5] [20] has been found to be easier to set up. In the present design the cavity inner conductor (a brass rod 10Ø  50 mm) has saw cuts (0.3 mm width) to create a tuning fork structure (Fig.…”

“…20 tanδL/W = -0.02 L/tanδW = 2.0 tanδL/tanδW = -0.6 Tables 7 and 8 show estimated sensitivity coefficients of the measured permittivity and loss tangent of the liquid as a function of the permittivity (W), loss tangent (tanδW) and thickness (tW) of the glass window. Uncertainty in the SPDR measurement of W is almost entirely associated with error in tW (so is considered to be a dependent contribution).…”

CARMEN : une plateforme de caractérisation métrologique dédiée aux nanomatériaux

“…REVUE FRANÇAISE DE MÉTROLOGIE n o 31, Volume 2012-3 Depuis le début des années 2000, on assiste à l'avène-ment d'une seconde génération d'instruments qui, riche des expériences acquises sur les premiers mAFMs, propose des solutions différentes, originales, et parfois plus performantes en termes d'incertitudes de mesure notamment. Ces nouveaux équipements permettent d'aborder la compréhension fine des interactions pointe-surface [16].…”

Model-aided hybrid metrology for surface roughness measurement fusing AFM and SEM data

“…The broadening of a protrusion width depends on its relation with tip radius. Various models have been proposed nicely reviewed in the recent paper by A. Yacoot and Koenders [5]. Based on simulations for columnar thin films, it has been argued that to get reliable AFM imaging of real surfaces the surface features should be sufficiently larger than those of the tip radius and have slopes smaller than those of the tip.…”