The methods of Differential Reflection Spectroscopy (DRS) and Atomic Force Microscopy (AFM) have been applied to study early stages of β-FeSi2 silicide formation. Some details on the Dynamic Standard method in DRS are presented. The imaginary part of the dielectric function of the β-FeSi2 film during its formation are calculated.
Electrical and optical properties of thin iron layers grown at room temperature on the epitaxial silicide Si(111)-(2 × 2)-Fe phase and on an Si(111)7 × 7 surface were investigated using in situ Hall effect registration, atomic force microscopy, and optical spectroscopy. It was established that Si(111)-(2 × 2)-Fe phase has semiconducting properties with a 0.99 eV effective band gap and acts as a diffusion barrier for the deposited iron atoms, preventing intermixing with the substrate at room temperature. Peculiarities in the optical spectra of a sample with a 2 nm iron film grown on the Si(111)-(2 × 2)-Fe phase typical for both metal and semiconducting natures prove a conservation of the phase under the iron layer. The process of iron growth on the Si(111)-(2 × 2)-Fe phase is accompanied by the development of high stress in the subsurface area resulting in band dispersion changes. Apparently the tension reaches a maximum at an iron layer thickness of 1.35 nm, and a high effective hole mobility equal to 820 cm(2) V(-1) s(-1) was registered.
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