“…Although EPMA has deviation in quantitative measurements for light elements, especially for samples with low electrical resistivity, the variation of film content can be implied to a certain extent [19] . From Table 2, it can be seen that the sample with the highest mobility has the lowest Zn/O atomic ratio, which can be concluded that ZnO electrical properties could be related with Zn/O atomic ratio [23][24][25] . Therefore, Zn/O atomic ratio is a very important factor for the electrical properties of ZnO films deposited on FTDF.…”