2000
DOI: 10.1016/s0022-0248(00)00685-0
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Wavelength control of arrayed waveguide by MOVPE selective area growth

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Cited by 25 publications
(10 citation statements)
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“…As a fabrication method for this array waveguide, the authors investigated selective organometallic vapor phase growth [6]. Devices fabricated by selective growth include a laser with the width of the selective growth mask varying along the resonator direction and a modulated integrated optical source [7].…”
Section: Analysis Of Deflection Characteristics With Selectively Growmentioning
confidence: 99%
“…As a fabrication method for this array waveguide, the authors investigated selective organometallic vapor phase growth [6]. Devices fabricated by selective growth include a laser with the width of the selective growth mask varying along the resonator direction and a modulated integrated optical source [7].…”
Section: Analysis Of Deflection Characteristics With Selectively Growmentioning
confidence: 99%
“…In SAG, the substrate is patterned by dielectric masks, on which any nucleation is avoided. Because deposition happens only in the openings, the growth rate of materials is enhanced and the composition of the material is also different from that on bare substrates [14]. The geometry of mask patterns including mask width and separation can then be used to tune the effective index (n eff ) of the SAG materials.…”
Section: Introductionmentioning
confidence: 99%
“…Fig.1 show schematic design of the wavelength selective switch which consists of input waveguide, two identical star coupler, arrayed waveguides, and output waveguides. The arrayed waveguides was fabricated by selective metal-organic vapor phase epitaxy (MOVPE) growth using the asymmetric SiO 2 mask pattern on both sides of the array [5,6]. In addition, the input waveguide, the star coupler, and the output waveguides also were fabricated by selective MOVPE grwoth.…”
Section: Introductionmentioning
confidence: 99%