2014
DOI: 10.4028/www.scientific.net/amm.493.552
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Visible Light Maskless Photolithography for Biomachining Application

Abstract: Maskless photolithograpy is an alternative method of conventional UV photolithograpy for microfabrication since its advantages of time and cost saving. For this reason, a visible-light based maskless photolithograpy is proposed as a part of biomachining process. Modification of the method is done by replacing light source of UV light to visible light, utilizing commercial DLP projector and changing the material removal process that generally uses echant with biomachining process. The process was done by using … Show more

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Cited by 13 publications
(8 citation statements)
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“…A gelatin-Rose Bengal mixture was coated on the surface of the glass plate coverslip by using a spin coater to obtain uniform thickness. Next, the mixture was exposed to a commercial DLP Projector Infocus TM at 500-550 nm (approximately yellow-green at the visible light level), as depicted in figure 1 [18]. This study applied a yellow color (in the Red Green Blue (RGB) color model: 255,255,0) as the light resource.…”
Section: B Photo-patterning Processmentioning
confidence: 99%
“…A gelatin-Rose Bengal mixture was coated on the surface of the glass plate coverslip by using a spin coater to obtain uniform thickness. Next, the mixture was exposed to a commercial DLP Projector Infocus TM at 500-550 nm (approximately yellow-green at the visible light level), as depicted in figure 1 [18]. This study applied a yellow color (in the Red Green Blue (RGB) color model: 255,255,0) as the light resource.…”
Section: B Photo-patterning Processmentioning
confidence: 99%
“…The PCB with photoresist dry film was exposed to a black color from the DLP projector beam, generated from a laptop connected to the projector. The exposure process was performed for seven minutes (Suwandi et al, 2014) using black (R = 0, G = 0, B = 0) by setting the custom color on Powerpoint. After exposure, the PCB with photoresist was inserted into the developing solution for a variation of time from one to five minutes.…”
Section: Developing Time With Black Color Exposurementioning
confidence: 99%
“…This experiment aimed to determine the effect of light blue color (R = 0, G = 172, B = 240) emitted from the DLP projector upon negative dry film photoresist. The light blue color was selected based on previous maskless photolithography experiments (Suwandi et al, 2014). This experiment's steps are identical to the previous process (section 2.3), changing black for light blue color and increasing the exposure time to five minutes.…”
Section: Exposure Time With Light Blue Color and Developing Without Smentioning
confidence: 99%
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“…[22][23][24][25] Photolithography, which is also known as optical lithography, is a process used in microfabrication to pattern parts of a thin film or the bulk of a substrate. The first step of photolithography is the substrate preparation, where the substrate is cleaned to remove any undesired substances, such as water, from the substrate surface.…”
Section: Physical Scaling Challengingmentioning
confidence: 99%