Varifocal liquid lenses with integrated actuator, high focusing power and low operating voltage fabricated on 200 mm wafers

Pouydebasque, A.; Bridoux, Claudine; Jacquet, F.; Moreau, S.; Saint-Patrice, D.; Bouvier, Christophe; Kopp, Christophe; Marchand, Gilles; Bolis, Sébastien; Sillon, N.; Vigier-Blanc, E.

doi:10.1016/j.proeng.2010.09.139

Cited by 12 publications

(11 citation statements)

References 15 publications

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“…Amongst the various working principles, the fluid-membrane approach has shown to be very promising since it allows for a large tuning range and integration of the actuators, e.g. [1][2][3]. However, only few approaches [4][5][6] exist for tunable cylindrical lenses, especially such lenses with fairly large clear apertures of several millimeters as we show in this work.…”

Section: Introductionmentioning

confidence: 89%

“…The geometry of the boundary constriction at the edges of the membrane limits the cylindrical behavior of the lens and results in a spherical membrane deflection. A rectangular membrane can be optimized for cylindrical deflection by widening the areas at the short ends of the rectangle as it was shown with a "dogbone" shaped boundary clamping in [3].…”

Section: Optimization Of the Actuator Geometrymentioning

confidence: 99%

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Cylindrical lens with integrated piezo actuation for focal length tuning and lateral scanning

Stürmer

Schatz

Wallrabe

2014

2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)

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We present a tunable cylindrical lens with an integrated actuation. Our device provides a large usable aperture of ca. 4 x 8 mm 2 and a tuning range of the focal length of more than 20 dpt. Additionally, it provides the possibility to move the lens vertex along one axis. The lens therefore enables scanning of the generated line focus. In this paper we describe the design with an actuator geometry which is optimized for good cylindricity, i.e. ratio of refractive power in the major and minor lens direction. Subsequently, a process for prototype fabrication as well as a characterization of the tuning and scanning behavior are shown.

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Section: Introductionmentioning

confidence: 89%

Section: Optimization Of the Actuator Geometrymentioning

confidence: 99%

Cylindrical lens with integrated piezo actuation for focal length tuning and lateral scanning

Stürmer

Schatz

Wallrabe

2014

2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)

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show abstract

“…Simple voltage actuation allows for robust and compact devices compared to optofluidic tunable lenses controlled with external microfluidics [8]. Flexible membrane liquid lenses without periphery components have been demonstrated with comparable voltages and tuning ranges [9][10][11], but have yet to be demonstrated as individually addressable arrays like electrowetting devices [6,12]. We have demonstrated electrowetting liquid lenses tunable from −43.5 to 0 diopters with 15 V DC and a power consumption of 25 μW, the lowest reported to the best of our knowledge.…”

Section: Introductionmentioning

confidence: 99%

Focus-tunable low-power electrowetting lenses with thin parylene films

et al. 2015

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Electrowetting lenses with record low power consumption (microwatts) have been demonstrated using high-quality parylene AF-4 dielectric layers and large dodecyl sulfate ions. Water and propylene glycol are interchanged as the polar liquid to enable diverging and converging lens operation achievable with the application of 15 V. The optical quality of the lenses is comparable to conventional microlenses and the tuning exhibits very little (<0.5°) contact angle hysteresis.

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“…Its tensile modulus of 3.2 GPa, as reported in the literature (4.1 GPa as measured here) [3], is too high for all those applications that require barrier coating on flexible moving parts such as stents and valves. Moreover, different studies have recently proposed parylene for the development of varifocal lenses, based on the encapsulation of a liquid between two parylene layers [4,5]. In fact, even though parylene deposition is conventionally performed on solid substrates, the so-called SOLID (solid on liquid deposition) process, pioneered by the authors, enables the encapsulation of liquids under a thin membrane of parylene C, without influencing their shape [6,7].…”

Section: Introductionmentioning

confidence: 99%

Enhanced elasticity in parylene thin films by copolymerization approach

et al. 2014

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The application of poly(p-xylylene)s as barrier and passivation layer is limited by the high tensile modulus of this class of materials. In this view, we propose a modified chemical vapor deposition approach to realize a series of copolymers based on parylene C, where linear alkyl chains partially replace the chlorides substituents. Thanks to the efficacious inclusion of bulky alkyl chains into the parylene layer, these modified materials show clear differences in both thermal and mechanical properties with respect to pristine parylene C. In particular, by following this approach, a decrease of the Young's modulus up to 0.3 GPa (13 times reduction of parylene C modulus) is observed, indicating a neat enhancement of the elastic behavior. Besides the improved mechanical performance, the modified materials retain both barrier and biocompatibility properties typical of neat parylene C. The results presented support copolymerization as a valuable approach for tuning parylene properties, which enlarges further the field of application of this excellent multipurpose material

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Varifocal liquid lenses with integrated actuator, high focusing power and low operating voltage fabricated on 200 mm wafers

Cited by 12 publications

References 15 publications

Cylindrical lens with integrated piezo actuation for focal length tuning and lateral scanning

Cylindrical lens with integrated piezo actuation for focal length tuning and lateral scanning

Focus-tunable low-power electrowetting lenses with thin parylene films

Enhanced elasticity in parylene thin films by copolymerization approach

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