This paper focuses on the mechanical properties of polydimethylsiloxane (PDMS) relevant for microelectromechanical system (MEMS) applications. In view of the limited amount of published data, we analyzed the two products most commonly used in MEMS, namely RTV 615 from Bayer Silicones and Sylgard 184 from Dow Corning. With regard to mechanical properties, we focused on the dependence of the elastic modulus on the thinner concentration, temperature and strain rate. In addition, creep and thermal aging were analyzed. We conclude that the isotropic and constant elastic modulus has strong dependence on the hardening conditions. At high hardening temperatures and long hardening time, RTV 615 displays an elastic modulus of 1.91 MPa and Sylgard 184 of 2.60 MPa in a range up to 40% strain.

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We present a new and accurate method to determine the Poisson's ratio of PDMS, using thermal expansion and an optical surface profilometer. The Poisson's ratio of Sylgard 184 was found to be n = 0.4950 AE 0.0010 and for Sylgard 182, n = 0.4974 AE 0.0006. Furthermore, we found that for both PDMS types, the coefficient of thermal expansion depends approximately linearly on the curing temperature. This method can be used for almost any kind of soft polymer that can be cured from a liquid at elevated temperatures.

Nuclear magnetic resonance spectroscopy (NMR) and imaging (MRI) are important non-destructive investigative techniques for soft matter research. Continuous advancements have not only lead to more sensitive detection, and new applications, but have also enabled the shrinking of the detectable volume of sample, and a reduction in time needed to acquire a spectrum or image. At the same time, advances in microstructuring and on-chip laboratories have also continued unabated. In recent years these two broad areas have been productively joined into what we term micro nuclear magnetic resonance (mMR), an exciting development that includes miniaturized detectors and hyphenation with other laboratory techniques, for it opens up a range of new possibilities for the soft matter scientist. In this paper we review the available miniaturization technologies for NMR and MRI detection, and also suggest a way to compare the performance of the detectors. The paper also takes a close look at chiplaboratory augmented mMR, and applications within the broad soft matter area. The review aims to contribute to a better understanding of both the scientific potential and the actual limits of mMR tools in the various interdisciplinary soft matter research fields.

We report the fabrication of 3D micro coils made with an automatic wire bonder. Using standard MEMS processes such as spin coating and UV lithography on silicon and Pyrex R wafers results in high aspect ratio SU-8 posts with diameters down to 100 μm that serve as mechanical stabilization yokes for the coils. The wire bonder is employed to wind 25 μm insulated gold wire around the posts in an arbitrary (e.g. solenoidal) path, yielding arrays of micro coils. Each micro coil is bonded directly on-chip, so that loose wire ends are avoided and, compared to other winding methods, coil re-soldering is unnecessary. The manufacturing time for a single coil is about 200 ms, and although the process is serial, it is batch fabrication compatible due to the high throughput of the machine. Despite the speed of manufacture we obtain high manufacturing precision and reliability. The micro air-core solenoids show an RF quality factor of over 50 when tested at 400 MHz. We present a flexible coil making method where the number of windings is only limited by the post height. The coil diameter is restricted by limits defined by lithography and the mechanical strength of the posts. Based on this technique we present coils ranging from 100 μm diameter and 1 winding up to 1000 μm diameter and 20 windings.