We report the fabrication of 3D micro coils made with an automatic wire bonder. Using standard MEMS processes such as spin coating and UV lithography on silicon and Pyrex R wafers results in high aspect ratio SU-8 posts with diameters down to 100 μm that serve as mechanical stabilization yokes for the coils. The wire bonder is employed to wind 25 μm insulated gold wire around the posts in an arbitrary (e.g. solenoidal) path, yielding arrays of micro coils. Each micro coil is bonded directly on-chip, so that loose wire ends are avoided and, compared to other winding methods, coil re-soldering is unnecessary. The manufacturing time for a single coil is about 200 ms, and although the process is serial, it is batch fabrication compatible due to the high throughput of the machine. Despite the speed of manufacture we obtain high manufacturing precision and reliability. The micro air-core solenoids show an RF quality factor of over 50 when tested at 400 MHz. We present a flexible coil making method where the number of windings is only limited by the post height. The coil diameter is restricted by limits defined by lithography and the mechanical strength of the posts. Based on this technique we present coils ranging from 100 μm diameter and 1 winding up to 1000 μm diameter and 20 windings.

We present for the first time a fully MEMS-integrated technology to manufacture 3D geometrically perfect solenoidal microcoils for microscale MRI applications. We report 25 microm isotropic resolution MR images of a copper sulfate aqueous phantom. These images are acquired using microcoils with 5 windings of insulated 25 microm diameter Au wire and with quality factors as high as 46 at the operating frequency (400 MHz).

We present a lab on a chip (LOC) compatible modular platform for magnetic resonance (MR)-based investigation of sub-millimetre samples. The platform combines the advantages offered respectively by microcoils (high resolution at the microscale) and macroscopic surface coils (large field of view) as MR-detectors and consists of a phased array of microcoils (PAMs) providing a flat MR-sensitive area of 18.3 mm(2) with a B(0)-field uniformity better than 0.25 ppm in the sensor centre area. We demonstrate both high-resolution magnetic resonance imaging (MRI) and NMR spectroscopy using this platform. To demonstrate the application for biological samples, we report MR imaging of fish oocytes with an in-plane resolution of 30 × 30 μm(2) and a contrast to noise ratio of 10 for a scan time of only 13 min 39 s. We have also demonstrated high-resolution spectroscopy of a water phantom achieving 11 ppb (4.5 Hz at 400 MHz) linewidth and an SNR of 28 for only 12 s scan time. State of the art automatic wire bonding technology in conjunction with MEMS techniques has been employed to manufacture the platform with potential applications in MR-investigation of planar samples.

This article describes the development and testing of the first automatically microfabricated probes to be used in conjunction with the magic angle coil spinning (MACS) NMR technique. NMR spectroscopy is a versatile technique for a large range of applications, but its intrinsically low sensitivity poses significant difficulties in analyzing mass- and volume-limited samples. The combination of microfabrication technology and MACS addresses several well-known NMR issues in a concerted manner for the first time: (i) reproducible wafer-scale fabrication of the first-in-kind on-chip LC microresonator for inductive coupling of the NMR signal and reliable exploitation of MACS capabilities; (ii) improving the sensitivity and the spectral resolution by simultaneous spinning the detection microcoil together with the sample at the “magic angle” of 54.74° with respect to the direction of the magnetic field (magic angle spinning – MAS), accompanied by the wireless signal transmission between the microcoil and the primary circuit of the NMR spectrometer; (iii) given the high spinning rates (tens of kHz) involved in the MAS methodology, the microfabricated inserts exhibit a clear kinematic advantage over their previously demonstrated counterparts due to the inherent capability to produce small radius cylindrical geometries, thus tremendously reducing the mechanical stress and tearing forces on the sample. In order to demonstrate the versatility of the microfabrication technology, we have designed MACS probes for various Larmor frequencies (194, 500 and 700 MHz) testing several samples such as water, Drosophila pupae, adamantane solid and LiCl at different magic angle spinning speeds.

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