Ultrasensitive Piezoelectric-Based Microcantilever Biosensor: Theory and Experiment

Faegh, Samira; Jalili, Nader; Sridhar, Srinivas

doi:10.1109/tmech.2014.2301835

Cited by 23 publications

(6 citation statements)

References 57 publications

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“…Xie et al [14] proposed a dynamic method for the application of rectangular microbeams as mass sensors using the Rayleigh-Ritz method. Faegh et al [15,16] proposed a self-measuring biosensor using a self-measuring electrical circuit for operation in a fluid environment.…”

Section: Introductionmentioning

confidence: 99%

Effect of microbeam geometry on the nano-mass sensor performance

Ardali

Ghaderi

Raeiszadeh

2019

Mechanics & Industry

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Microbeams have a wide range of applications as sensors and actuators in nanotechnology, biotechnology, microelectromechanical systems, and optics. Given their micrometer dimensions, these beams make precision mass sensors of sub-nanogram accuracy. An important challenge regarding mass sensors is to enhance their sensitivity and accuracy. Considering the fact that, this type of sensor operates based on the resonance frequency variations caused by nanoparticle absorption in the dynamic mode, the geometry of the microbeam is considered an important parameter affecting their sensitivity. This paper studies the rectangular microbeam, which is one of the most commonly used types of mass sensors. Three main models were selected by applying inner and outer cuts on the microbeam, and vibrating simulation was carried out using ABAQUS software for a total of 36 mass sensor configurations with different aspect ratios. Simulation results in two selected rectangular microbeam models with outer cuts show the sensitivity of the microsensor increases with increased microbeam rigidity. The triangular hollow microbeam was found to be the best design among the four models selected to be used as mass sensors.

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Section: Introductionmentioning

confidence: 99%

Effect of microbeam geometry on the nano-mass sensor performance

Ardali

Ghaderi

Raeiszadeh

2019

Mechanics & Industry

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“…Microcantilevers are the most simplified MEMS-based devices [ 142 ], which have been used in various applications such as physical, chemical, and biological sensing. They have been used for blood glucose monitoring [ 143 ], gas molecules detection, and disease screening [ 144 , 145 ]. Furthermore, microcantilevers have been utilized in atomic force microscopy (AFM) for the topography imaging of the surface for almost the last four decades [ 146 , 147 ].…”

Section: Piezoelectric Mems Actuating and Sensing For Gas Detectionmentioning

confidence: 99%

A review of piezoelectric MEMS sensors and actuators for gas detection application

et al. 2023

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Piezoelectric microelectromechanical system (piezo-MEMS)-based mass sensors including the piezoelectric microcantilevers, surface acoustic waves (SAW), quartz crystal microbalance (QCM), piezoelectric micromachined ultrasonic transducer (PMUT), and film bulk acoustic wave resonators (FBAR) are highlighted as suitable candidates for highly sensitive gas detection application. This paper presents the piezo-MEMS gas sensors’ characteristics such as their miniaturized structure, the capability of integration with readout circuit, and fabrication feasibility using multiuser technologies. The development of the piezoelectric MEMS gas sensors is investigated for the application of low-level concentration gas molecules detection. In this work, the various types of gas sensors based on piezoelectricity are investigated extensively including their operating principle, besides their material parameters as well as the critical design parameters, the device structures, and their sensing materials including the polymers, carbon, metal–organic framework, and graphene.

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“…Numerous designs of mechanical resonators are reported as a mass sensor. Due to their limitations in dealing with liquid samples such as the effect of high damping and electrical interference with droplets, almost all of them have disadvantages for droplet (Adhikari and Kim, 2016; Liu et al , 2017; Faegh et al , 2015; Sauerbrey, 1959; Lucklum et al , 2013).…”

Section: Introductionmentioning

confidence: 99%

Advanced resonator mass sensor for molecule detection in droplet

Eidi

Shamsi

Ghavifekr

2023

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Purpose This paper aims to a novel fabricated resonator structure which consists of some single mechanical resonators as a mass sensor. Design/methodology/approach The structure is proposed to detect the target molecules and cells in a droplet. Also, at this design the mechanical coupling springs of the proposed structure are designed in such a way that it resonates in shear resonance mode which minimizes the damping effect. Findings This proposed design can be fabricated in different sizes due to the requirements of an application. Originality/value The proposed design is fabricated in mesoscale and its mass sensitivity is evaluated and reported in this paper.

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Ultrasensitive Piezoelectric-Based Microcantilever Biosensor: Theory and Experiment

Cited by 23 publications

References 57 publications

Effect of microbeam geometry on the nano-mass sensor performance

Effect of microbeam geometry on the nano-mass sensor performance

A review of piezoelectric MEMS sensors and actuators for gas detection application

Advanced resonator mass sensor for molecule detection in droplet

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