Effect of microbeam geometry on the nano-mass sensor performance

Abstract

Microbeams have a wide range of applications as sensors and actuators in nanotechnology, biotechnology, microelectromechanical systems, and optics. Given their micrometer dimensions, these beams make precision mass sensors of sub-nanogram accuracy. An important challenge regarding mass sensors is to enhance their sensitivity and accuracy. Considering the fact that, this type of sensor operates based on the resonance frequency variations caused by nanoparticle absorption in the dynamic mode, the geometry of the microbeam is considered an important parameter affecting their sensitivity. This paper studies the rectangular microbeam, which is one of the most commonly used types of mass sensors. Three main models were selected by applying inner and outer cuts on the microbeam, and vibrating simulation was carried out using ABAQUS software for a total of 36 mass sensor configurations with different aspect ratios. Simulation results in two selected rectangular microbeam models with outer cuts show the sensitivity of the microsensor increases with increased microbeam rigidity. The triangular hollow microbeam was found to be the best design among the four models selected to be used as mass sensors.

Enhancing Sensitivity of Double-Walled Carbon Nanotubes with Longitudinal Magnetic Field

“…Shorter beams are more sensitive, due to the presence of the magnetic intensity for the bridged, cantilevered, and simply supported nanotubes. In the case of the absence of a magnetic field, this finding is in line with those reported in the literature [11,60] and the experimental observations reported by Chaste et al [37].…”

“…The dynamic method analyzes the shift in the system's frequency due to the attached mass [9]. A higher frequency shift shows the superior sensitivity of a mass sensor [10], which is affected by various parameters, such as geometry [11], vibration modes [12], the characteristics of the structure [13], and surface functionalization [14]. Additionally, external parameters, such as temperature and environmental conditions, can affect the performance of nano-mass sensors [15].…”

“…Zarepour et al [16] studied the transverse vibrations of supported and bridged nano-beams, which had attached masses and rotational and transverse springs at their ends. The effects of the geometric parameters of mechanical elements were also considered by Ardali et al [11]; in particular, they investigated the impacts of the various geometric parameters of microbeams on mass sensors and realized that the sensitivity of a microsensor increases with microbeam rigidity. In another work, Bouchaala et al [17] compared micro-CNTs and beam mass sensors and found that the CNT-based sensor was more sensitive than the microbeam sensor.…”

A review of piezoelectric MEMS sensors and actuators for gas detection application

“…The deflection is usually proportional to the analyte concentration. Research on resonant microcantilever sensors has focused on enhancing and improving their mass sensitivity by several methods including introducing new material with unique properties, scaling down, or modifying their structural configuration [ 154 , 155 ].…”