Ultrahigh vacuum precise positioning device utilizing rapid deformations of piezoelectric elements

Yamagata, Yusuke; Higuchi, Toshiro; Saeki, H.; Ishimaru, Hajime

doi:10.1116/1.576446

Cited by 50 publications

(22 citation statements)

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“…Most inertia motors described in the literature-especially those designed for microscopy applications-use hard materials for the friction couple. Aluminum oxide (Al 2 O 3 , sometimes as a ceramic, in most cases in crystalline form as corundum and its varieties sapphire and ruby) predominates [104,105,126,[153][154][155][156][157], but quartz (SiO 2 ) [49,104,154], different glasses [105,158,159], or other ceramics [158] are also used. Combinations of one of these hard materials and metals are also common, mostly with steel [30,44,51,52,78,96,139,160,161] or bronze [49,162,163], sometimes also with other metals [49,[164][165][166].…”

Section: Friction Couplementioning

confidence: 99%

“…Higuchi, Yamagata et al [110,158] have shown that a parabolic rise of the voltage can be reasonable to reach a constant acceleration, and thus a constant inertial force. They also explain that the large acceleration occurring when the voltage stops increasing can be used to generate additional displacement in moving actuator motors (cp.…”

Section: Voltage Signals For Low-frequency Operationmentioning

confidence: 99%

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Piezoelectric Inertia Motors—A Critical Review of History, Concepts, Design, Applications, and Perspectives

Hunstig

2017

Actuators

109

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Piezoelectric inertia motors-also known as stick-slip motors or (smooth) impact drives-use the inertia of a body to drive it in small steps by means of an uninterrupted friction contact. In addition to the typical advantages of piezoelectric motors, they are especially suited for miniaturisation due to their simple structure and inherent fine-positioning capability. Originally developed for positioning in microscopy in the 1980s, they have nowadays also found application in mass-produced consumer goods. Recent research results are likely to enable more applications of piezoelectric inertia motors in the future. This contribution gives a critical overview of their historical development, functional principles, and related terminology. The most relevant aspects regarding their design-i.e., friction contact, solid state actuator, and electrical excitation-are discussed, including aspects of control and simulation. The article closes with an outlook on possible future developments and research perspectives.

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Section: Friction Couplementioning

confidence: 99%

Section: Voltage Signals For Low-frequency Operationmentioning

confidence: 99%

Piezoelectric Inertia Motors—A Critical Review of History, Concepts, Design, Applications, and Perspectives

Hunstig

2017

Actuators

109

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“…Because the piezoelectric element is embedded into the moving element, this motor could be considered as a moving actuator type. Many of the inertia-drive type motors developed afterwards operate according to the above-mentioned initial structures [31][32][33][34][35][36][37][38][39][40][41][42][43][44][45]. We can also find literature that proposes ideal driving signals with detailed analysis of motion at the interface [46,47].…”

Section: Inertia-drivementioning

confidence: 99%

Piezoelectric Motor Using In-Plane Orthogonal Resonance Modes of an Octagonal Plate

Spanner

Koç

2018

Actuators

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Piezoelectric motors use the inverse piezoelectric effect, where microscopically small periodical displacements are transferred to continuous or stepping rotary or linear movements through frictional coupling between a displacement generator (stator) and a moving (slider) element. Although many piezoelectric motor designs have various drive and operating principles, microscopic displacements at the interface of a stator and a slider can have two components: tangential and normal. The displacement in the tangential direction has a corresponding force working against the friction force. The function of the displacement in the normal direction is to increase or decrease friction force between a stator and a slider. Simply, the generated force alters the friction force due to a displacement in the normal direction, and the force creates movement due to a displacement in the tangential direction. In this paper, we first describe how the two types of microscopic tangential and normal displacements at the interface are combined in the structures of different piezoelectric motors. We then present a new resonance-drive type piezoelectric motor, where an octagonal plate, with two eyelets in the middle of the two main surfaces, is used as the stator. Metallization electrodes divide top and bottom surfaces into two equal regions orthogonally, and the two driving signals are applied between the surfaces of the top and the bottom electrodes. By controlling the magnitude, frequency and phase shift of the driving signals, microscopic tangential and normal displacements in almost any form can be generated. Independently controlled microscopic tangential and normal displacements at the interface of the stator and the slider make the motor have lower speed-control input (driving voltage) nonlinearity. A test linear motor was built by using an octagonal piezoelectric plate. It has a length of 25.0 mm (the distance between any of two parallel side surfaces) and a thickness of 3.0 mm, which can produce an output force of 20 N.

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“…Piezoelectric inertia drive motors have been used for both optical and scanning probe microscopes successfully in vacuum environments [65,66].…”

Section: Piezo-walk-drive-type Piezoelectric Motorsmentioning

confidence: 99%

Piezoelectric Motors, an Overview

2016

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Piezoelectric motors are used in many industrial and commercial applications. Various piezoelectric motors are available in the market. All of the piezoelectric motors use the inverse piezoelectric effect, where microscopically small oscillatory motions are converted into continuous or stepping rotary or linear motions. Methods of obtaining long moving distance have various drive and functional principles that make these motors categorized into three groups: resonance-drive (piezoelectric ultrasonic motors), inertia-drive, and piezo-walk-drive. In this review, a comprehensive summary of piezoelectric motors, with their classification from initial idea to recent progress, is presented. This review also includes some of the industrial and commercial applications of piezoelectric motors that are presently available in the market as actuators.

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Ultrahigh vacuum precise positioning device utilizing rapid deformations of piezoelectric elements

Cited by 50 publications

References 0 publications

Piezoelectric Inertia Motors—A Critical Review of History, Concepts, Design, Applications, and Perspectives

Piezoelectric Inertia Motors—A Critical Review of History, Concepts, Design, Applications, and Perspectives

Piezoelectric Motor Using In-Plane Orthogonal Resonance Modes of an Octagonal Plate

Piezoelectric Motors, an Overview

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