Piezoelectric Inertia Motors—A Critical Review of History, Concepts, Design, Applications, and Perspectives

Hunstig, Matthias

doi:10.3390/act6010007

Cited by 111 publications

(69 citation statements)

References 193 publications

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“…Due to the guideways and the bearings, linear motions of the piezo positioners translate into a linear motion along the travel direction and rotations around the tip or tilt axis. The positioners are SmarAct SLC-1730 nanometer-precision linear piezo positioners, which are based on the stick-slip principle (Hunstig, 2017). They are operated in closed-looped (encoder feedback) and are controlled by the SmarAct MCS controller module with the Advanced Sensor Calibration (ASC) option.…”

Section: Figurementioning

confidence: 99%

Reaction microscope endstation at FLASH2

et al. 2019

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A reaction microscope dedicated to multi‐particle coincidence spectroscopy on gas‐phase samples is installed at beamline FL26 of the free‐electron laser FLASH2 in Hamburg. The main goals of the instrument are to follow the dynamics of atoms, molecules and small clusters on their natural time‐scale and to study non‐linear light–matter interaction with such systems. To this end, the reaction microscope is combined with an in‐line extreme‐ultraviolet (XUV) split‐delay and focusing optics, which allows time‐resolved XUV‐XUV pump–probe spectroscopy to be performed.

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Section: Figurementioning

confidence: 99%

Reaction microscope endstation at FLASH2

et al. 2019

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“…Hunstig summarized the features of piezoelectric motors and discussed their applications and prospective [20]. Liu et al proposed a piezoelectric actuator using different bending vibration modes to perform linear or rotary motions [21][22][23].…”

Section: Configuration Of the Motormentioning

confidence: 99%

“…Wang et al proposed a high-speed rotary ultrasonic motor and discussed its capability for driving micro air vehicles [17][18][19]. Hunstig summarized the features of piezoelectric motors and discussed their applications and prospective [20]. Liu et al proposed a piezoelectric actuator using different bending vibration modes to perform linear or rotary motions [21][22][23].…”

Section: Introductionmentioning

confidence: 99%

A Novel Dual-Rotor Ultrasonic Motor for Underwater Propulsion

Wang

Shen

et al. 2019

Applied Sciences

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Micro underwater vehicles (MUVs) have been highlighted recently for underwater explorations because of their high maneuverability, low price, great flexibility, etc. The thrusters of most conventional MUVs are driven by electromagnetic motors, which need big mechanical transmission parts and are prone to being interrupted by the variance of ambient electromagnetic fields. In this paper, a novel dual-rotor ultrasonic motor with double output shafts, compact size, and no electromagnetic interference is presented, characterized, and applied for actuating underwater robots. This motor was composed of a spindle-shaped stator, pre-pressure modulation unit, and dual rotors, which can output two simultaneous rotations to increase the propulsion force of the MUV. The pre-pressure modulation unit utilized a torsion spring to adjust the preload at the contact faces between the stator and rotor. The working principle of the ultrasonic motor was developed and the vibration mode of the stator was analyzed by the finite element method. Experimental results show that the no-load rotary speed and stalling torque of the prototype ultrasonic motor were 110 r/min and 3 mN·m, respectively, with 150 V peak-to-peak driving voltage at resonance. One underwater robot model equipped with the proposed ultrasonic motor-powered thruster could move at 33 mm/s immersed in water. The dual-rotor ultrasonic motor proposed here provides another alternative for driving MUVs and is appropriate for developing specific MUVs when the electromagnetic interference issue needs to be considered.

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“…Piezoelectric motors are the main candidates for use in small mechanical systems [1][2][3][4][5][6][7][8][9][10][11][12][13][14][15][16]. The advantages compared to electromagnetic ones with the same size and weight include high power density, insensitivity towards a magnetic field, silent, direct drive without a gear mechanism, a quick response without backlash, maintaining a position with no energy consumption and a high dynamic range of velocity with high positioning accuracy [12][13][14][15][16].…”

Section: Introductionmentioning

confidence: 99%

Piezoelectric Motor Using In-Plane Orthogonal Resonance Modes of an Octagonal Plate

Spanner

Koç

2018

Actuators

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Piezoelectric motors use the inverse piezoelectric effect, where microscopically small periodical displacements are transferred to continuous or stepping rotary or linear movements through frictional coupling between a displacement generator (stator) and a moving (slider) element. Although many piezoelectric motor designs have various drive and operating principles, microscopic displacements at the interface of a stator and a slider can have two components: tangential and normal. The displacement in the tangential direction has a corresponding force working against the friction force. The function of the displacement in the normal direction is to increase or decrease friction force between a stator and a slider. Simply, the generated force alters the friction force due to a displacement in the normal direction, and the force creates movement due to a displacement in the tangential direction. In this paper, we first describe how the two types of microscopic tangential and normal displacements at the interface are combined in the structures of different piezoelectric motors. We then present a new resonance-drive type piezoelectric motor, where an octagonal plate, with two eyelets in the middle of the two main surfaces, is used as the stator. Metallization electrodes divide top and bottom surfaces into two equal regions orthogonally, and the two driving signals are applied between the surfaces of the top and the bottom electrodes. By controlling the magnitude, frequency and phase shift of the driving signals, microscopic tangential and normal displacements in almost any form can be generated. Independently controlled microscopic tangential and normal displacements at the interface of the stator and the slider make the motor have lower speed-control input (driving voltage) nonlinearity. A test linear motor was built by using an octagonal piezoelectric plate. It has a length of 25.0 mm (the distance between any of two parallel side surfaces) and a thickness of 3.0 mm, which can produce an output force of 20 N.

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Piezoelectric Inertia Motors—A Critical Review of History, Concepts, Design, Applications, and Perspectives

Cited by 111 publications

References 193 publications

Reaction microscope endstation at FLASH2

Reaction microscope endstation at FLASH2

A Novel Dual-Rotor Ultrasonic Motor for Underwater Propulsion

Piezoelectric Motor Using In-Plane Orthogonal Resonance Modes of an Octagonal Plate

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