Piezoelectric Motors, an Overview

Spanner, Karl; Koç, Burhanettin

doi:10.3390/act5010006

Cited by 95 publications

(40 citation statements)

References 40 publications

(45 reference statements)

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“…We have classified resonance-drive piezoelectric motors based on various criteria such as, type of microscopic motion at the interface, and the method of direction change. The interested reader can refer to our previous paper [6].…”

Section: Resonance-drivementioning

confidence: 99%

“…Piezoelectric motors are the main candidates for use in small mechanical systems [1][2][3][4][5][6][7][8][9][10][11][12][13][14][15][16]. The advantages compared to electromagnetic ones with the same size and weight include high power density, insensitivity towards a magnetic field, silent, direct drive without a gear mechanism, a quick response without backlash, maintaining a position with no energy consumption and a high dynamic range of velocity with high positioning accuracy [12][13][14][15][16].…”

Section: Introductionmentioning

confidence: 99%

“…The advantages compared to electromagnetic ones with the same size and weight include high power density, insensitivity towards a magnetic field, silent, direct drive without a gear mechanism, a quick response without backlash, maintaining a position with no energy consumption and a high dynamic range of velocity with high positioning accuracy [12][13][14][15][16]. According to functional principles, construction, and drive specifications, piezoelectric motors can be categorized into three groups: piezo-walk-drive, inertia-drive and resonance-drive [6].…”

Section: Introductionmentioning

confidence: 99%

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Piezoelectric Motor Using In-Plane Orthogonal Resonance Modes of an Octagonal Plate

Spanner

Koç

2018

Actuators

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Piezoelectric motors use the inverse piezoelectric effect, where microscopically small periodical displacements are transferred to continuous or stepping rotary or linear movements through frictional coupling between a displacement generator (stator) and a moving (slider) element. Although many piezoelectric motor designs have various drive and operating principles, microscopic displacements at the interface of a stator and a slider can have two components: tangential and normal. The displacement in the tangential direction has a corresponding force working against the friction force. The function of the displacement in the normal direction is to increase or decrease friction force between a stator and a slider. Simply, the generated force alters the friction force due to a displacement in the normal direction, and the force creates movement due to a displacement in the tangential direction. In this paper, we first describe how the two types of microscopic tangential and normal displacements at the interface are combined in the structures of different piezoelectric motors. We then present a new resonance-drive type piezoelectric motor, where an octagonal plate, with two eyelets in the middle of the two main surfaces, is used as the stator. Metallization electrodes divide top and bottom surfaces into two equal regions orthogonally, and the two driving signals are applied between the surfaces of the top and the bottom electrodes. By controlling the magnitude, frequency and phase shift of the driving signals, microscopic tangential and normal displacements in almost any form can be generated. Independently controlled microscopic tangential and normal displacements at the interface of the stator and the slider make the motor have lower speed-control input (driving voltage) nonlinearity. A test linear motor was built by using an octagonal piezoelectric plate. It has a length of 25.0 mm (the distance between any of two parallel side surfaces) and a thickness of 3.0 mm, which can produce an output force of 20 N.

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Section: Resonance-drivementioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Piezoelectric Motor Using In-Plane Orthogonal Resonance Modes of an Octagonal Plate

Spanner

Koç

2018

Actuators

Self Cite

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“…This contribution does not aim to provide a general review or classification of piezoelectric motors, as many authors have done so before, e.g., [8]; [9] (pp. [27][28][29][30][31][32][33]; [10]; [11] (p. 32); [12] (p. 414); [13] (p. 5); [14]; [15] (p. 9); [16][17][18]. The proposed classification schemas differ, and none of them comprises all motor variants described in literature.…”

Section: Introductionmentioning

confidence: 99%

Piezoelectric Inertia Motors—A Critical Review of History, Concepts, Design, Applications, and Perspectives

Hunstig

2017

Actuators

102

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Piezoelectric inertia motors-also known as stick-slip motors or (smooth) impact drives-use the inertia of a body to drive it in small steps by means of an uninterrupted friction contact. In addition to the typical advantages of piezoelectric motors, they are especially suited for miniaturisation due to their simple structure and inherent fine-positioning capability. Originally developed for positioning in microscopy in the 1980s, they have nowadays also found application in mass-produced consumer goods. Recent research results are likely to enable more applications of piezoelectric inertia motors in the future. This contribution gives a critical overview of their historical development, functional principles, and related terminology. The most relevant aspects regarding their design-i.e., friction contact, solid state actuator, and electrical excitation-are discussed, including aspects of control and simulation. The article closes with an outlook on possible future developments and research perspectives.

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“…The produced movement is fast and extremely accurate; as a result, the piezo-actuators are widely used in many nanopositioning applications [1,2]. Such applications involve microscopy, lithography, nanomanufacturing, and optics, all of which have been gaining popularity in the last few decades [3,4].…”

Section: Introductionmentioning

confidence: 99%

High-Precision Control of a Piezo-Driven Nanopositioner Using Fuzzy Logic Controllers

Altaher

Aphale

2018

Computers

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This paper presents single-and dual-loop fuzzy control schemes to precisely control the piezo-driven nanopositioner in the x-and y-axis directions. Various issues are associated with this control problem, such as low stability margin due to the sharp resonant peak, nonlinear dynamics, parameter uncertainty, etc. As such, damping controllers are often utilised to damp the mechanical resonance of the nanopositioners. The Integral Resonant Controller (IRC) is used in this paper as a damping controller to damp the mechanical resonance. A further inherent problem is the hysteresis phenomenon (disturbance), which leads to degrading the positioning performance (accuracy) of the piezo-driven stage. The common approach to treat this disturbance is to invoke tracking controllers in a closed-loop feedback scheme in conjunction with the damping controllers. The traditional approach uses the Integral Controller (I) or Proportional Integral (PI) as a tracking controller, whereas this paper introduces the Proportional and Integral (PI)-like Fuzzy Logic Controller (FLC) as a tracking controller. The effectiveness of the proposed control schemes over conventional schemes is confirmed through comparative simulation studies, and results are presented. The stability boundaries of the proposed control schemes are determined in the same way as with a conventional controller. Robustness against variations in the resonant frequency of the proposed control schemes is verified.

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Piezoelectric Motors, an Overview

Cited by 95 publications

References 40 publications

Piezoelectric Motor Using In-Plane Orthogonal Resonance Modes of an Octagonal Plate

Piezoelectric Motor Using In-Plane Orthogonal Resonance Modes of an Octagonal Plate

Piezoelectric Inertia Motors—A Critical Review of History, Concepts, Design, Applications, and Perspectives

High-Precision Control of a Piezo-Driven Nanopositioner Using Fuzzy Logic Controllers

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