Two-Dimensional Silicon Smart Tactile Image-Sensor with Single Sensing Diaphragm Actuated by Vibrating Pressure for Simultaneous Detection of Force and Object Hardness Distributions

Abstract

In this paper, a novel tactile image-sensor with detection ability of two-dimensional distributions of object hardness and contact-force is presented. Actuating the sensing diaphragm by small pressure vibration, plural information of the object on the tactile image-sensor can be detected with the same sensing elements on it. Hardness distribution of touching object is detected simultaneously with distribution of static contact-force, since their signals are processed separately in frequency domain. In addition, since vibrating sensor surface is highly sensitive to slight contact-force, initial point of object touching with below 500µN force was successfully detected at the same time.

Metrology of freeform shaped parts

“…By applying a force F to the membrane, the distance between the membrane and the fibre tip changes. The change of distances in the whole sensor array can be used to infer to a haptic behaviour caused by the force F. To allow for touching forces below 500 μN, demands on the accuracy of all parts of the sensor are high [165]. For the setup shown, glass fibres with a diameter of 100 μm have to be positioned into a 400 μm hole with a lateral tolerance of +/-50 μm.…”

A multifunctional integrated silicon tactile imager with arrays of strain and temperature sensors on single crystal silicon diaphragm

“…The first fabrication results of the multifunctional tactile imager are reported in a conference proceeding [22]. After that, a multifunctional tactile imager with the detection ability of surface elasticity has been developed and reported [23]. In this paper, the detailed principles and the latest evaluation results of the silicon multifunctional tactile imager are presented and discussed systematically for the first time.…”

A Robust and Sensitive Silicon-MEMS Tactile-Imager with Scratch Resistant Surface and Over-Range Protection

“…For example, robot finger-tip will be one of the suitable applications in future. Silicon tactile-imagers with integrated sensor array on a pneumatically swollen silicon diaphragm for detection of contact-force [5], temperature [6], and hardness [7] distributions have been developed and reported by our group. Although silicon tactile-imagers have excellent spatial resolution and sensitivity as compared to polymer-based sensors, they are relatively weak for scratching and over-range input force due to fragility of silicon devices.…”