A multifunctional integrated silicon tactile imager with arrays of strain and temperature sensors on single crystal silicon diaphragm

Takao, Hidekuni; Yawata, M.; Sawada, Kazuaki; Ishida, M.

doi:10.1016/j.sna.2010.03.039

Cited by 41 publications

(21 citation statements)

References 22 publications

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“…Some important parameters for contact force sensors include thickness, flexibility, sensitivity, and mass-fabrication capabilities. Soft materials like Polydimethylsiloxsane (PDMS), Poly(methyl methacrylate) (PMMA), conductive rubber were used to skirt these aspects and simplify fabrication approaches [25]–[27], [30]. In all these techniques, though the force sensor can be miniaturized, the packaging makes the whole system bulky.…”

Section: Introductionmentioning

confidence: 99%

MEMS-Based Flexible Force Sensor for Tri-Axial Catheter Contact Force Measurement

Pandya

Sheng

Desai

2017

J. Microelectromech. Syst.

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Atrial fibrillation (AFib) is a significant healthcare problem caused by the uneven and rapid discharge of electrical signals from pulmonary veins (PVs). The technique of radiofrequency (RF) ablation can block these abnormal electrical signals by ablating myocardial sleeves inside PVs. Catheter contact force measurement during RF ablation can reduce the rate of AFib recurrence, since it helps to determine effective contact of the catheter with the tissue, thereby resulting in effective power delivery for ablation. This paper presents the development of a three-dimensional (3D) force sensor to provide the real-time measurement of tri-axial catheter contact force. The 3D force sensor consists of a plastic cubic bead and five flexible force sensors. Each flexible force sensor was made of a PEDOT:PSS strain gauge and a PDMS bump on a flexible PDMS substrate. Calibration results show that the fabricated sensor has a linear response in the force range required for RF ablation. To evaluate its working performance, the fabricated sensor was pressed against gelatin tissue by a micromanipulator and also integrated on a catheter tip to test it within deionized water flow. Both experiments simulated the ventricular environment and proved the validity of applying the 3D force sensor in RF ablation.

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Section: Introductionmentioning

confidence: 99%

MEMS-Based Flexible Force Sensor for Tri-Axial Catheter Contact Force Measurement

Pandya

Sheng

Desai

2017

J. Microelectromech. Syst.

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“…However, it is difficult to realize quantification of human hand feeling using previous devices. Many tactile sensors have diaphragm structure which contacts on the surface vertical to the object [1][2][3][4]. The stroke of the structure is not usually long enough, and detection performance of the micro roughness of the contact of the object is poor.…”

Section: Introductionmentioning

confidence: 99%

A novel configuration of tactile sensor to acquire the correlation between surface roughness and frictional force

Kozai

Terao

Suzuki

et al. 2015

2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

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In this paper, a novel configuration of (horizontal type) MEMS tactile sensor that can interact with micro surface roughness at a high resolution are proposed and reported for quantification of the fingertip sense. Two-axis movements of the contactor-tip are independently detected by the two independent suspensions. The contactor is sticking out of the side surface of the silicon chip, and its over-range motion is protected by the embedded stopper structure during the sweeping motion for tactile sensing on the object. In the evaluation experiment, Correlation between the surface shape and the local frictional force were successfully obtained at the same time and at the same point for many samples (paper, plastic, rubber etc.) for the first time.

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“…However, many organs and skin hardness is distributing in the range from 4HS to 50 HS [5][6][7], and improvement of resolution is necessary in hardness detection of human organs. Previously, we have developed integrated multifunctional tactile imagers with detection abilities of 3-axis force and temperature distribution [8]. Furthermore, hardness detection proposed by our group using the "reference plane" structure showed a detection ability of hardness [9].…”

Section: Introductionmentioning

confidence: 99%

A tactile sensor with the reference plane for detection abilities of frictional force and human body hardness aimed to medical applications

Maeda

Terao

Suzuki

et al. 2015

2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

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In this study, a novel tactile sensor with detection abilities of human body hardness and frictional force is reported. A new device configuration of back-side contact is proposed to realize a higher sensitivity of hardness, and low sensitivity to normal force. Miniaturization and sensitivity improvement of tactile sensor are important to apply the sensor to palpation inside of the body. Surface frictional force was successfully measured with rubber block in real time using our tactile image sensor. A completed device was evaluated, and shore A hardness was measured in the range from 1 HS to 54 HS. This performance corresponds to the hardness detection ability of adiposus in human body.

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A multifunctional integrated silicon tactile imager with arrays of strain and temperature sensors on single crystal silicon diaphragm

Cited by 41 publications

References 22 publications

MEMS-Based Flexible Force Sensor for Tri-Axial Catheter Contact Force Measurement

MEMS-Based Flexible Force Sensor for Tri-Axial Catheter Contact Force Measurement

A novel configuration of tactile sensor to acquire the correlation between surface roughness and frictional force

A tactile sensor with the reference plane for detection abilities of frictional force and human body hardness aimed to medical applications

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