TwinGrid: A wafer post-processed multistage Micro Patterned Gaseous Detector

Bilevych, Y.; Carballo, V.M. Blanco; Chefdeville, M.; Fransen, M.; Graaf, H. van der; Salm, Cora; Schmitz, Jurriaan; Timmermans, J.

doi:10.1016/j.nima.2009.09.054

Cited by 11 publications

(8 citation statements)

References 23 publications

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“…Also in this case the micromesh structures could be fabricated directly over unpackaged Medipix2 and Timepix CMOS chips that were used as anodes and readout electronics, thus demonstrating an integrated gaseous-pixel detector (Figure 3a). The possibility of having stacked grid layers to act as multiple electron amplification stages was reported [12]. In this case the bottom layer is produced with the conventional SU-8 coating, exposure, metallization and Cathode Anode development process, while for the successive layers spin coating is replaced by hot-roller lamination of uncrosslinked SU-8 films, allowing stacking up to three stages of micromeshes (Figure 3b).…”

Section: Micromesh Gaseous Structure Detectorsmentioning

confidence: 99%

SU-8 as a Material for Microfabricated Particle Physics Detectors

Maoddi

Mapelli

Jiguet³

et al. 2014

Micromachines

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Several recent detector technologies developed for particle physics applications are based on microfabricated structures. Detectors built with this approach generally exhibit the overall best performance in terms of spatial and time resolution. Many properties of the SU-8 photoepoxy make it suitable for the manufacturing of microstructured particle detectors. This article aims to review some emerging detector technologies making use of SU-8 microstructuring, namely micropattern gaseous detectors and microfluidic scintillation detectors. The general working principle and main process steps for the fabrication of each device are reported, with a focus on the advantages brought to the device functionality by the use of SU-8. A novel process based on multiple bonding steps for the fabrication of thin multilayer microfluidic scintillation detectors developed by the authors is presented. Finally, a brief overview of the applications for the discussed devices is given.

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Section: Micromesh Gaseous Structure Detectorsmentioning

confidence: 99%

SU-8 as a Material for Microfabricated Particle Physics Detectors

Maoddi

Mapelli

Jiguet³

et al. 2014

Micromachines

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“…A second module with pixelized readout is in preparation. This time the gas amplification stage is not made of GEMs but of a Micromegas mesh, which has been produced on top of the Timepix chip with the help of post-processing methods [23]. Because of the reduced structure size compared to GEMs, a further improvement of the performance is possible.…”

Section: Test Beam Operations With Pixel Readout Systemsmentioning

confidence: 99%

A large TPC prototype for a linear collider detector

Schade

Kamiński

2011

Nuclear Instruments and Methods in Physics Research Section A:

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A Time Projection Chamber (TPC), operated in a detector at a future linear e + e − collider, will require a significantly advanced readout concept compared to the traditional pad-wire-based systems used previously. The LCTPC collaboration studies the prospects of TPC readout systems based on Micro Pattern Gas Detectors, namely GEMs and Micromegas, in combination with pads or a CMOS on the underlying anode plane. In small TPC prototype chambers, resolutions of better than σ ⊥ = 100 µm were demonstrated for drift distances of up to 66 cm. In the future, the R&D efforts will focus on the technical realization of large-surface readout systems with the aim to develop a technical concept for a readout module of a future TPC. A Large TPC Prototype with a diameter of 77 cm has been constructed for the planned studies. It is part of a test beam infrastructure at the electron test beam at DESY. First test beam operations with Micromegas and GEM based prototype modules in December 2008 and during 2009 gave promising results.

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“…The alignment of such layers is routinely done with high accuracy. Application of a multitude of electrodes can improve the overall gas gain, reduce the ion feedback, and lead to a faster signal [35].…”

Section: Status Of the Ingrid Microsystemmentioning

confidence: 99%

Gridpix - Chip Post-processing

Schmitz¹

2010

Proceedings of VERTEX 2009 (18th Workshop) — PoS(VERTEX 2009)

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InGrid, the technology used to make CMOS-integrated high voltage electrodes for micropattern gaseous detectors is reviewed in this paper. It is presented in the broader context of CMOS wafer post-processing. This processing platform is briefly described, and recent highlights of this manufacturing approach are brought forward. The InGrid technology facilitates research into radiation imaging detectors with fully integrated electronics. VERTEX 2009 (18th workshop)

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TwinGrid: A wafer post-processed multistage Micro Patterned Gaseous Detector

Cited by 11 publications

References 23 publications

SU-8 as a Material for Microfabricated Particle Physics Detectors

SU-8 as a Material for Microfabricated Particle Physics Detectors

A large TPC prototype for a linear collider detector

Gridpix - Chip Post-processing

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