Tunable coherent radiation in the soft X-ray and extreme ultraviolet spectral regions

Attwood, David; Naulleau, Patrick; Goldberg, Kenneth A.; Tejnil, Edita; Chang, Chang; Beguiristain, Raul; Batson, Phillip J.; Bokor, Jeffrey; Gullikson, Eric M.; Koike, Masato; Medecki, H.; Underwood, J. H.

doi:10.1109/3.760317

Cited by 55 publications

(31 citation statements)

References 33 publications

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“…In the EUV region, this has already successfully been achieved with beamline 12.0.1 at the ALS [23,24]. This thesis will develop a branchline to achieve the above characteristics in the SXR region.…”

Section: Euv/sxr Sourcesmentioning

confidence: 99%

Tunable coherent radiation at soft X-ray wavelengths: Generation and interferometric applications

Rosfjord

2004

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The availability of high power, spectrally and spatially coherent soft x-rays (SXR) would facilitate a wide variety of experiments as this energy region covers the primary resonances of many magnetic and biological materials. Specifically, there are the carbon and oxygen K-edges that are critical for biological imaging in the water window and the L-edges of iron, nickel, and cobalt for which imaging and scattering studies can be performed.A new coherent soft X-ray branchline at the Advanced Light Source has begun operation (beamline 12.0.2). Using the third harmonic from an 8 cm period undulator, this branch delivers coherent soft x-rays with photon energies ranging from 200eV to 1keV. This branchline is composed of two sub-branches one at 14X demagnification and the other 8X demagnification. The former is optimized for use at 500eV and the latter at 800eV. Here the expected power from the third harmonic of this undulator and the beamline design and characterization is presented. The characterization includes measurements on available photon flux as well as a series of double pinhole experiments to determine the coherence factor with respect to transverse distance. The first high quality Airy patterns at SXR wavelengths are created with this new beamline.The operation of this new beamline allows for interferometry to be performed in the SXR region. Here an interferometric experiment designed to directly determine the index of refraction of a material under test is performed.Measurements are first made in the EUV region using an established beamline (beamline12.0.1) to measure silicon, ruthenium and tantalum silicon nitride. This work is then extended to the SXR region using beamline 12.0.2 to test chromium and vanadium.

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Section: Euv/sxr Sourcesmentioning

confidence: 99%

Tunable coherent radiation at soft X-ray wavelengths: Generation and interferometric applications

Rosfjord

2004

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“…When such a system is used, for example, as the effective source in a Köhler illuminator (the source is in the back focal plane of the condenser lens), the illumination coherence can be controlled by setting the size and/or shape of the illumination spot on the ground glass. Diffuser-based coherence reduction has been proposed at EUV [4], to address the problem of performing lithography using highly coherent synchrotron sources [5,6], however, fabrication difficulties have rendered the method impractical in the past.…”

Section: Introductionmentioning

confidence: 99%

Design, fabrication, and characterization of high-efficiency extreme-ultraviolet diffusers

et al. 2004

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As the development of extreme ultraviolet (EUV) lithography progresses, interest grows in the extension of traditional optical components to the EUV regime. The strong absorption of EUV by most materials and its extremely short wavelength, however, makes it very difficult to implement many components that are commonplace in the longer wavelength regimes. One such example is the diffuser often implemented with ordinary ground glass in the visible light regime. Here we demonstrate the fabrication of reflective EUV diffusers with high efficiency within a controllable bandwidth. Using these techniques we have fabricated diffusers with efficiencies exceeding 10% within a moderate angular singlesided bandwidth of approximately 0.06 radians.

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“…Researchers have made extensive use of highaverage-power beams of polarized coherent shortwavelength radiation produced by undulators at modern synchrotron facilities. 1 Experiments have also been conducted with polarized soft-x-ray radiation from laserproduced plasmas. 2 The development of compact tabletop sources of high-power polarized soft-x-ray radiation can be expected to have a widespread effect on applications in several fields.…”

Section: Introductionmentioning

confidence: 99%

Generation and application of a high-average-power polarized soft-x-ray laser beam

et al. 2001

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We demonstrate the generation of a highly polarized soft-x-ray beam with a compact high-repetition-rate tabletop soft-x-ray laser. The radiation emitted by a high-average-power discharge-pumped tabletop Ne-like Ar soft-x-ray laser operating at 46.9 nm was polarized with a pair of Si/Sc multilayer mirrors designed for 45°o peration. A degree of polarization greater than 0.96 was obtained. The polarized beam was used to characterize the efficiency of a diffraction grating. Intense polarized soft-x-ray radiation generated by compact tabletop sources has the potential to affect numerous other applications.

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Tunable coherent radiation in the soft X-ray and extreme ultraviolet spectral regions

Cited by 55 publications

References 33 publications

Tunable coherent radiation at soft X-ray wavelengths: Generation and interferometric applications

Tunable coherent radiation at soft X-ray wavelengths: Generation and interferometric applications

Design, fabrication, and characterization of high-efficiency extreme-ultraviolet diffusers

Generation and application of a high-average-power polarized soft-x-ray laser beam

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