Generation and application of a high-average-power polarized soft-x-ray laser beam

Benware, B.; Seminario, M.; Lecher, A. L.; Rocca, J. J.; Unspenskii, Y. A.; Виноградов, А. В.; Кондратенко, В. В.; Pershing, Yu. P.; Bach, B.

doi:10.1364/josab.18.001041

Cited by 9 publications

(3 citation statements)

References 15 publications

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“…They obtained a minimum value of k of $0.03 at 26.9 eV, a photon energy close to the Ne-like Ar line laser operating at 26.4 eV. 21 These reported low-absorption values were a motivation for this research, since, if verified, they could render SrF 2 a promising material for multilayer coatings operating near 26.9 eV. Nevertheless, a much larger k value of 0.45 for SrF 2 films was measured at 26.9 eV in the present research.…”

Section: A Transmittance and Extinction Coefficient Of Srfmentioning

confidence: 87%

Optical constants of SrF2 thin films in the 25–780-eV spectral range

Marcos

Larruquert

Aznárez

et al. 2013

Journal of Applied Physics

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The transmittance and the optical constants of SrF 2 thin films, a candidate material for multilayer coatings operating in the extreme ultraviolet and soft x-rays, have been determined in the spectral range of 25-780 eV, in most of which no experimental data were previously available. SrF 2 films of various thicknesses were deposited by evaporation onto room-temperature, thin Al support films, and their transmittance was measured with synchrotron radiation. The transmittance as a function of film thickness was used to calculate the extinction coefficient k at each photon energy. A decrease in density with increasing SrF 2 film thickness was observed. In the calculation of k, this effect was circumvented by fitting the transmittance versus the product of thickness and density. The real part of the refractive index of SrF 2 films was calculated from k with Kramers-Kr€ onig analysis, for which the measured spectral range was extended both to lower and to higher photon energies with data in the literature combined with interpolations and extrapolations. With the application of f-and inertial sum rules, the consistency of the compiled data was found to be excellent. V

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Section: A Transmittance and Extinction Coefficient Of Srfmentioning

confidence: 87%

Optical constants of SrF2 thin films in the 25–780-eV spectral range

Marcos

Larruquert

Aznárez

et al. 2013

Journal of Applied Physics

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“…Multilayer (ML) based interference reflective optics working at near-normal incidence − in the 35–50 nm spectral range has impetuously progressed in the past two decades, which advances applications of discharge X-ray or EUV lasers, − X-ray astronomy, soft X-ray microscopy, and high order harmonic generation (HHG) instrumentations, where MLs with high reflectivity and thermal stability are required. However, the use of multilayer structure is restricted by low reflectivity because all of the materials show a strong absorption in the 35–50 nm spectral range.…”

Section: Introductionmentioning

confidence: 99%

Interface Study on the Effect of Carbon and Boron Carbide Diffusion Barriers in Sc/Si Multilayer System

Zhu

Zhang

Jiang

et al. 2020

ACS Appl. Mater. Interfaces

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Sc/Si multilayers are one of the promising material combinations commonly used in the spectral range of 35−50 nm. However, diffusion and silicidation at the interfaces of Sc/Si multilayers limit widespread applications of this material combination. To improve the properties of Sc/Si multilayers, the scheme of barrier layers is utilized. In this work, a series of Sc/Si multilayers with boron carbide and carbon barrier layers were designed and fabricated to compare the properties including interface quality and thermal stability. The effect on the multilayer structure and quality before and after annealing were investigated by using grazingincidence X-ray reflection, X-ray diffraction, rocking-curve X-ray diffuse scattering, transmission electron microscopy, and selected area electron diffraction. The results indicate that severe interdiffusion and crystallization occur in the multilayer with a carbon barrier after annealing. However, a boron carbide barrier layer improves thermal stability up to 550 °C since the interfaces remain abrupt and clear after annealing. The multilayer quality is confirmed to be improved significantly.

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“…Scandium-silicon (Sc/Si) multilayers were shown to be effective in the wavelength range of 38-50 nm with reflectivities of 30-50% at normal incidence [13]. They demonstrated their feasibility in laser interferometry [14], polarimetry [15], ellipsometry [16], spectroscopy [17] and microscopy with nano-scale resolution [18]. Sc/Si MXMs could focus laser energy (λ = 46.9 nm) to the intensity of up to ∼10 11 W/cm 2 that is in excess of the ablation threshold for metallic materials [19].…”

Section: Introductionmentioning

confidence: 99%

Reactive diffusion in Sc/Si multilayer X-ray mirrors with CrB2 barrier layers

et al. 2011

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Processes undergoing in Sc/Si multilayer X-ray mirrors (MXMs) with periods of ∼27 nm and barrier layers of CrB 2 0.3-and 0.7-nm thick within the temperature range of 420-780 K were studied by methods of small-angle Xray reflectivity (λ = 0.154 nm) and cross-sectional transmission electron microscopy. All layers with the exception of Sc ones are amorphous. Barrier layers are stable at least up to a temperature of 625 K and double the activation energy of diffusional intermixing at moderate temperatures. Introduction of barriers improves the thermal stability of Sc/Si MXMs at least by 80 degrees. Diffusion of Si atoms through barrier layers into Sc layers with formation of silicides was shown to be the main degradation mechanism of MXMs. A comparison of the stability for Sc/Si MXMs with different barriers published in the literature is conducted. The ways of further improvement of barrier properties are discussed.

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Generation and application of a high-average-power polarized soft-x-ray laser beam

Cited by 9 publications

References 15 publications

Optical constants of SrF2 thin films in the 25–780-eV spectral range

Optical constants of SrF2 thin films in the 25–780-eV spectral range

Interface Study on the Effect of Carbon and Boron Carbide Diffusion Barriers in Sc/Si Multilayer System

Reactive diffusion in Sc/Si multilayer X-ray mirrors with CrB2 barrier layers

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