Towards the third dimension in direct electron beam writing of silver

Höflich, Katja; Jurczyk, Jakub; Madajska, Katarzyna; Götz, Maximilian; Berger, Luisa; Guerra‐Nuñez, Carlos; Haverkamp, Caspar; Szymańska, Iwona; Utke, Ivo

doi:10.3762/bjnano.9.78

Cited by 22 publications

(29 citation statements)

References 30 publications

(47 reference statements)

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“…With a few exceptions [8,24,[68][69][70][71][72][73][74], FEBID materials notoriously suffer from high levels of contaminants (usually carbon) due to incomplete precursor molecule dissociation. The contamination accumulates as partially dissociated molecular fragments become incorporated in the deposit.…”

Section: Materials and Functionalitiesmentioning

confidence: 99%

“…Apart from strong autocatalytic growth effects or very low precursor fluxes, there are no real reasons why the fabrication of freestanding structures should not be possible with these precursors. A particularly interesting material for plasmonic applications is silver, which has recently been demonstrated to be 3D compatible [73]. For this special precursor, the authors identified the GIS alignment and proper heating of both the GIS and the substrate, as decisive elements, which currently are in an optimization phase to achieve sub-100 nm, 3D nanostructures via FEBID.…”

Section: Challengesmentioning

confidence: 99%

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Focused Electron Beam-Based 3D Nanoprinting for Scanning Probe Microscopy: A Review

Plank

Winkler

Schwalb³

et al. 2019

Micromachines

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Scanning probe microscopy (SPM) has become an essential surface characterization technique in research and development. By concept, SPM performance crucially depends on the quality of the nano-probe element, in particular, the apex radius. Now, with the development of advanced SPM modes beyond morphology mapping, new challenges have emerged regarding the design, morphology, function, and reliability of nano-probes. To tackle these challenges, versatile fabrication methods for precise nano-fabrication are needed. Aside from well-established technologies for SPM nano-probe fabrication, focused electron beam-induced deposition (FEBID) has become increasingly relevant in recent years, with the demonstration of controlled 3D nanoscale deposition and tailored deposit chemistry. Moreover, FEBID is compatible with practically any given surface morphology. In this review article, we introduce the technology, with a focus on the most relevant demands (shapes, feature size, materials and functionalities, substrate demands, and scalability), discuss the opportunities and challenges, and rationalize how those can be useful for advanced SPM applications. As will be shown, FEBID is an ideal tool for fabrication/modification and rapid prototyping of SPM-tipswith the potential to scale up industrially relevant manufacturing.

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Section: Materials and Functionalitiesmentioning

confidence: 99%

Section: Challengesmentioning

confidence: 99%

Focused Electron Beam-Based 3D Nanoprinting for Scanning Probe Microscopy: A Review

Plank

Winkler

Schwalb³

et al. 2019

Micromachines

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“…Several recent studies have demonstrated that focused electron beam induced processing (FEBIP) has high potential for the controlled bottom-up fabrication of metallic 3D nanostructures [1][2][3][4][5][6][7][8][9][10][11][12][13][14]. Furthermore, the basic processes during FEBIP are understood to more and more detail leading to developments towards more diverse, cleaner and more defined deposits for various potential applications [7,[15][16][17][18].…”

Section: Introductionmentioning

confidence: 99%

Additive Nano-Lithography with Focused Soft X-rays: Basics, Challenges, and Opportunities

Späth

2019

Micromachines

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Focused soft X-ray beam induced deposition (FXBID) is a novel technique for direct-write nanofabrication of metallic nanostructures from metal organic precursor gases. It combines the established concepts of focused electron beam induced processing (FEBIP) and X-ray lithography (XRL). The present setup is based on a scanning transmission X-ray microscope (STXM) equipped with a gas flow cell to provide metal organic precursor molecules towards the intended deposition zone. Fundamentals of X-ray microscopy instrumentation and X-ray radiation chemistry relevant for FXBID development are presented in a comprehensive form. Recently published proof-of-concept studies on initial experiments on FXBID nanolithography are reviewed for an overview on current progress and proposed advances of nanofabrication performance. Potential applications and advantages of FXBID are discussed with respect to competing electron/ion based techniques. polymer resulting in 3D patterning by radiation chemistry [33,34]. The approach is limited to materials with significantly different absorption cross-sections at the chosen incident photon energies, as in transmission geometry, all layers are exposed to the beam at different degrees of focusing. However, such experiments open a completely novel perspective for complex direct-write nanofabrication. It should be mentioned that during the late 1980s and early 1990s several groups attempted to exploit broad-band synchrotron light [38][39][40][41] as well as the monochromatic X-ray beam of a photon-induced scanning Auger microscope [42,43] for additive manufacturing of metal deposits from metal organic precursors. However, due to limited instrumental capabilities, only spatially extended thin films with an optimum of some 10 µm resolution could be produced [43].FXBID exploits the photon energy-selectivity of synchrotron-based XRL and extends it by the idea of depositing metal nanostructures from suitable precursor gases [21,22]. The use of a STXM setup for these experiments offers several advantages. STXM is a raster-scanning technique which avoids the necessity of shadow masks. According to comparable results from polymer lithography the theoretical minimum feature size of the deposited metal structures is mainly determined by the spot size of the incident beam [36,37]. Recent developments in X-ray optics have pushed this parameter below 10 nm [44,45]. Finally, STXM can be employed for an in-situ analysis of the metallic deposits directly after fabrication by means of resonant imaging and near-edge X-ray absorption fine structure (NEXAFS) spectroscopy to evaluate confinement, growth rates, oxidation state and chemical purity [21,22,46,47]. X-ray magnetic circular dichroism (XMCD) can be used to characterize magnetic deposits with respect to their magnetization and coercivity [48].This review presents some basic principles of X-ray optics and X-ray microscopy as well as X-ray beam dosimetry that are relevant for FXBID experiments. In accordance, limitations, challenges and opportunities of additiv...

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“…Another approach is to identify molecular subunits that can form stable nonreactive and volatile products upon electron–precursor interaction. The carboxylate group is such a subunit [ 12 – 16 ]. It holds the promise that it may easily fragment to yield thermodynamically stable CO 2 during electron exposure and thus enhance precursor fragmentation.…”

mentioning

confidence: 99%

“…It holds the promise that it may easily fragment to yield thermodynamically stable CO 2 during electron exposure and thus enhance precursor fragmentation. This expectation is met by a novel fluorinated silver carboxylate precursor that yields deposits with so far unprecedented silver content including 3D structures [ 15 – 16 ]. However, given a favorable structure, even large organic ligands may be removed more easily than previously anticipated, as exemplified by the electron-induced dissociation of benzene–Cr(CO) 3 [ 17 ] and by FEBID using the fluorine-free precursor Cu(tbaoac) 2 [ 18 ].…”

mentioning

confidence: 99%