Thin resistive film with temperature coefficient of resistance close to zero

Effects of metal Ni with catalytic activity on magnetron sputtered Cr–Si resistive film in a heat and humid environment

“…These two kinds of alloy targets were prepared by powder metallurgy, the size of which was 382 mm × 128 mm × 14 mm. Metal Ni, like other metals such as Al, Ti, Ta and Zr, is mainly used to improve the performance of Cr-Si resistive films [17][18][19][20] in discrete resistors and hybrid integrated circuit application.…”

Ni–Cr thin film resistor fabrication for GaAs monolithic microwave integrated circuits

“…We chose to work with Ni-Cr because it is reported to have a better stability compared to TaN [1]. Moreover, TaN exhibits a range of low to high negative TCR [2] values, whereas films with near-zero TCR are reported for Ni-Cr [3]. Much work has been published on Ni-Cr films in discrete resistors [4,5].…”

RF parameter extraction of MMIC nichrome resistors

“…Recently, there has been much interest in the field of PBG [1,2], and several novel microwave PBG structures have been proposed [3,4]. Among those, a uniplanar compact photonic bandgap (UC-PBG) structure [3] is of particular interest because of its easy integration and low cost.…”

“…Among those, a uniplanar compact photonic bandgap (UC-PBG) structure [3] is of particular interest because of its easy integration and low cost. It has been successfully applied to various applications such as broadband low-pass filters; harmonictuned power amplifiers, and so on [4,7].…”

“…These are usually fabricated from TaN and NiCr, although other metals may be used [1,2]. NiCr resistors have low TCR and small parasitics, and are widely used in circuit design [3,4].…”