Mesa structures were etched in HgCdTe using different Br 2 /HBr/Ethylene glycol (EG) formulations. Etch rate and degree of anisotropy (A) were studied in detail for all of the combinations. Addition of EG to the conventional etchant gave A Ͼ 0.5, with controllable etch rates. Optimum etchant composition was determined to be 2% Br 2 in a 3:1 mixture of EG:HBr. This composition resulted in a good anisotropy factor of ϳ0.6 and a reasonably optimum etch rate of ϳ2.5 µm/min, with rms surface roughness of ϳ2 nm. Kinetics of the etching reaction have also been studied for the optimum etchant concentration and an etching mechanism has been proposed.
This paper presents the electrical comparison of Au and Ni/Au gated HEMT devices and diodes. Au Schottky diodes on an AlGaN/GaN heterostructure exhibit better electrical performance in comparison to conventional Ni/Au diodes with an improved Schottky barrier height (SBH) and lower reverse leakage current. The SBH extracted from I-V for Au and Ni/Au is 1.29 eV and 0.74 eV, respectively. Au Schottky contacts on GaN have a better ideality factor of 1.55 than Ni, which is 1.61. Capacitance-voltage measurement revealed a positive shift in threshold voltage in the case of Au diodes with a reduced capacitance value with respect to Ni/Au diodes. This decrease in threshold and capacitance indicates a decrease in the 2DEG carrier concentration. The decrease in the 2DEG carrier concentration is consistent with three terminal device measurements. Despite a small decrease in drain current (8%), the Au gated HEMT devices have shown an improved subthreshold slope (13%) and nearly 4 order improvement in the ION/IOFF ratio than Ni/Au gated HEMTs. Pulse IV characterization has indicated that gate lag and drain lag have no major changes with respect to gate metal, whereas current collapse increases for high work function metals.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.