2003
DOI: 10.1002/mop.11233
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RF parameter extraction of MMIC nichrome resistors

Abstract: The lumped‐element electrical equivalent circuit of nichrome (NiCr) resistors is important for monolithic microwave integrated circuit (MMIC) design. This paper presents a methodology for the RF parameter extraction of thin‐film NiCr resistors fabricated on GaAs substrate. An algorithm based on DUT S parameters has been developed to extract the electrical parameters of the equivalent circuit up to 18 GHz for a large number of resistors of varying geometries and geometry‐scaleable curve‐fitted equations for the… Show more

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Cited by 17 publications
(5 citation statements)
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“…This is primarily because their values and performance are determined by the fabrication process rather than design equations. The equivalent circuit models for Rsh used in this study are those proposed by S. Renu et al [11], which incorporate a series inductance denoted by LS due to the NiCr's length. Additionally, L. Wang et al [12] reported an equivalent circuit for the MIM capacitance, which includes the prime lumped component and the inductances of the top and bottom metals.…”
Section: B Modelling Of Passive Componentsmentioning
confidence: 99%
“…This is primarily because their values and performance are determined by the fabrication process rather than design equations. The equivalent circuit models for Rsh used in this study are those proposed by S. Renu et al [11], which incorporate a series inductance denoted by LS due to the NiCr's length. Additionally, L. Wang et al [12] reported an equivalent circuit for the MIM capacitance, which includes the prime lumped component and the inductances of the top and bottom metals.…”
Section: B Modelling Of Passive Componentsmentioning
confidence: 99%
“…Therefore, the equivalent circuits were verified and experimental validated using fitting approaches with the S-parameters data to extract of RF parameters. The equivalent circuit module of the resistors and spiral inductor realized here is similar to the one reported in [30][31][32]. Because of their rather low temperature coefficient of resistance compared with semiconductor active layer resistors, thin film resistive metals are preferred for use in MMIC applications [33].…”
Section: Passive Elementsmentioning
confidence: 99%
“…Ni-Cr resistors offer specific points of interest for applications with extraordinary demand for high stability as well as low TCR-like chosen circuits for measuring hardware, information handling, media transmission, etc [1][2][3][4][5][6][7][8][9][10][11][12][13][14]. In GaAs monolithic microwave integrated circuits (MMICs), thin film metal resistors are promptly superseding semiconductor resistors where the resistive medium is a mesa etched or an ion implanted GaAs active layer.…”
Section: Introductionmentioning
confidence: 99%
“…In GaAs monolithic microwave integrated circuits (MMICs), thin film metal resistors are promptly superseding semiconductor resistors where the resistive medium is a mesa etched or an ion implanted GaAs active layer. The metal film should have high thermal resistance, low TCR to be utilize as a resistive material in MMIC [1][2][3][4][5][6]. Ni-Cr is a significant competitor metal films for GaAs MMICs as it has very well material consistency with MMIC fabrication.…”
Section: Introductionmentioning
confidence: 99%