Thin Film Electrodes for High Temperature Surface Acoustic Wave Devices

Richter, Denny; Sakharov, S.; Forsén, E.; Mayer, Elena; Reindl, L.; Fritze, Holger

doi:10.1016/j.proeng.2011.12.042

Cited by 35 publications

(22 citation statements)

References 9 publications

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“…In the same time, Ir films are much more impacted, as the resistance gains one order of magnitude. This spectacular increase can be surely attributed to the formation of the volatile IrO 3 , which occurrence is well established at 900°C, as described by several authors [11,16]. Consequently, at the end of the annealing process (4 days at 800°C + 7 days at 900°C) the electrical resistance of Ir films is approximately three times higher than those of Ir 0.85 Rh 0.15 and Ir 0.7 Rh 0.3 films, both being actually very close.…”

Section: Introductionsupporting

confidence: 66%

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Comparison between Ir, Ir0.85Rh0.15 and Ir0.7Rh0.3 thin films as electrodes for surface acoustic waves applications above 800 °C in air atmosphere

Taguett

Aubert

Elmazria

et al. 2017

Sensors and Actuators A: Physical

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Section: Introductionsupporting

confidence: 66%

“…A more serious issue consists in the transformation of IrO 2 into volatile IrO 3 at higher temperatures. This phenomenon occurs between 800 and 900°C [11].…”

Section: Introductionmentioning

confidence: 92%

Comparison between Ir, Ir0.85Rh0.15 and Ir0.7Rh0.3 thin films as electrodes for surface acoustic waves applications above 800 °C in air atmosphere

Taguett

Aubert

Elmazria

et al. 2017

Sensors and Actuators A: Physical

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“…Most recent attempts to minimize the degradation of electrodes and prolong the lifetime of SAW elements include use of metal alloys as well as high-temperature ceramic electrodes. Richter et al report about successful operation of SAW elements at 800 • C for several hours using Ti / Pt coated langasite (Richter et al, 2011). Further attempts include application of thin protective layers, like Al 2 O 3 .…”

Section: Stability Of the Electrodes For Baw And Saw Resonatorsmentioning

confidence: 99%

Correlation of BAW and SAW properties of langasite at elevated temperatures

Schulz¹,

Mayer²,

Shrena³

et al. 2015

J. Sens. Sens. Syst.

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Abstract. The full set of electromechanical data of langasite (La 3 Ga 5 SiO 14 ) is determined in the temperature range from 20 to 900 • C using differently oriented bulk acoustic wave resonators. For data evaluation a physical model of vibration is developed and applied. Thereby, special emphasis is taken on mechanical and electrical losses at high temperatures. The resulting data set is used to calculate the properties of surface acoustic waves. Direct comparison with experimental data such as velocity, coupling coefficients and propagation loss measured using surface acoustic wave devices with two different crystal orientations shows good agreement.

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“…• d11 according to the temperature In the rotated coordinate system, the coupling factor 26 ′ of shear thickness vibration mode is given by Eq. (4).…”

Section: Piezoelectric Propertiesmentioning

confidence: 99%

High temperature piezoelectric properties of flux-grown α-GeO2 single crystal

Papet

Bah

Haidoux

et al. 2019

Journal of Applied Physics

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The temperature-dependence of the piezoelectric properties of trigonal -GeO2 single-crystals obtained by the high-temperature flux method was measured by the resonance technique of the electrical impedance in the 20°C -600°C range. To approach the values of the two independent piezoelectric coefficients d11 and d14, we first measured as a function of temperature the elastic coefficients S11, S14 and S66 and the dielectric permittivity 11 which are involved in the coupling coefficient k of both the thickness shear mode and the transverse mode. A Y-cut plate with a simple +45°-rotation ((YXtwl) +45°/0°/0°) was used to measure the coupling coefficient of the thickness shear mode, and two X-turned plates ((XYtwl) +45°/0°/0° and (XYtwl) -45°/0°/0°) were prepared to characterize the coupling coefficient of two transverse modes. From the whole experimental measurements, the piezoelectric coefficients of -GeO2 were calculated up to 600 °C. They show that this crystal is one of the most efficient in regard of the -quartz-like family at room temperature, and that its thermal comportment retains large piezoelectric properties up to 600°C.

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Thin Film Electrodes for High Temperature Surface Acoustic Wave Devices

Cited by 35 publications

References 9 publications

Comparison between Ir, Ir0.85Rh0.15 and Ir0.7Rh0.3 thin films as electrodes for surface acoustic waves applications above 800 °C in air atmosphere

Comparison between Ir, Ir0.85Rh0.15 and Ir0.7Rh0.3 thin films as electrodes for surface acoustic waves applications above 800 °C in air atmosphere

Correlation of BAW and SAW properties of langasite at elevated temperatures

High temperature piezoelectric properties of flux-grown α-GeO2 single crystal

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