Surface acoustic wave (SAW) sensors are steadily paving the way to wider application areas. Their main benefit consisting in the possibility of wireless interrogation with the radio frequency interrogation signal being the only energy source for the reradiated signal. This feature is getting more and more attractive with the growing demand in monitoring multiple industrial objects difficult to access by wired sensors in harsh environments. Among such wider applications, the possibility of making measurements of temperature, deformation, vibrations, and some other parameters at temperatures in the range of 300 °C-1000 °C look quite promising. This paper concentrates on specific features of the SAW resonator-based sensors operation at this temperature range. High-temperature influences the material choice and thus the properties of SAW resonators design peculiarities intended for use at high temperature. It is suggested that preferable designs should use synchronous resonators with relatively thick electrodes (10% of wavelength) based on Ir or Pt alloys while benefiting from the possibilities of specific designs that could reduce the negative impact of thick electrodes on the manufacturing in quantity. This solution benefits from lower resonance frequency scatter because of the automatic compensation of SAW velocity decrease due to electrode metallization ratio increase. This compensation originates from the resonance frequency increase that is related to the decrease of the Bragg bandwidth defined by the reflection. It is shown in modeling examples that the value of metallization ratio at which this compensation occurs is close to 65%-70%.
Ferroelectric LiNb1–x
Ta
x
O3 solid solutions with various Nb/Ta ratio were grown from the melt by the Czochralski method. The exact composition of the grown crystals was determined by inductively coupled plasma atomic mass spectrometry. The dependence of the crystal composition on the composition of the initial melt was obtained and explained by a wide separation between the phase boundaries of the liquid and solid phases on the LiNbO3–LiTaO3 phase diagram. Using high-resolution X-ray diffraction, the parameters a and c of a crystal unit cell were determined (LiNb0.88Ta0.12O3: a = 5.1574 Å and c = 13.8498 Å). Further, the Curie temperature T
C of the crystals was measured using the differential scanning calorimetry technique. T
C was found to depend on the composition of the crystals that allowed conditions for the monodomainization of the grown crystals to be defined (LiNb0.88Ta0.12O3: T
C = 1102°C; LiNb0.33Ta0.67O3: T
C = 794°C). Finally, the velocity of surface acoustic waves was determined by scanning electron microscopy and X-ray diffraction techniques (YZ-cut of a LiNb0.88Ta0.12O3 crystal: V = 3440 m s−1).
The possibility of creating resonant ultraviolet (UV) sensors based on the structure of ZnO nanorods/La3Ga5SiO14 microbalance (LCM) has been investigated. The principle of sensor operation is based on the desorption of oxygen from the surface of ZnO nanorods upon irradiation with UV light and an increase in the concentration of charge carriers that leads to an increase in the capacitance of the structure of ZnO nanorods/LCM. It has been shown that UV radiation intensity affects the resonance oscillation frequency of the LCM sensor. After the end of irradiation, the reverse process of oxygen adsorption on the surface of ZnO nanorods occurs, and the resonance frequency of the sensor oscillations returns to the initial value.
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