Theoretical and experimental investigation of langasite as material for wireless high temperature SAW sensors

Sakharov, S.; Kondratiev, S.N.; Zabelin, A.; Naumenko, Natalya; Azarov, A. V.; Zhgoon, Sergei; Shvetsov, A.

doi:10.1109/ultsym.2010.5935533

Cited by 27 publications

(15 citation statements)

References 5 publications

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“…Calculations of temperature coefficient of frequency (TCf) for Langasite with Pt-metallization or Al/AlxOy/Pt multi-layer metallization based on previously available material parameters [7], [8], [9] showed significant deviations from our experimental results and results given in [10] for temperatures beyond 200°C. These calculations are mandatory to search for optimum crystal cuts for temperature sensors on Langasite.…”

Section: Determination Of Lgs Materials Parameterscontrasting

confidence: 74%

C3.3 - A 600°C Wireless and Passive Temperature Sensor Based on Langasite SAW-Resonators

Wall¹,

Gruenwald²,

Klein³

et al. 2015

Proceedings SENSOR 2015

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Section: Determination Of Lgs Materials Parameterscontrasting

confidence: 74%

C3.3 - A 600°C Wireless and Passive Temperature Sensor Based on Langasite SAW-Resonators

Wall¹,

Gruenwald²,

Klein³

et al. 2015

Proceedings SENSOR 2015

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“…Compared to other metals, which we investigated previously (W, Pt) [4], Ir has the longest life time and smaller resistance at high temperatures, between 500º and 800ºC. Besides, Ir does not require any sublayer, due to its good adhesiveness to LGS.…”

Section: Experimental Devices and Resonator Characteristicsmentioning

confidence: 95%

“…The previously reported sets of LGS material constants (for example, [1]- [3]) usually comprise the first-and second-order temperature coefficients. Our preliminary investigation of SAW resonators with W, Pt and Ir electrodes built on different orientations of LGS, in a wide interval of temperatures [4], has revealed that these constants help to predict the temperature behavior of SAW resonators on LGS up to 250ºC. At higher temperatures, simulations diverge with experiments.…”

Section: Introductionmentioning

confidence: 95%

Characterization of langasite for application in high temperature SAW sensors

Sakharov

Naumenko

Zabelin

et al. 2011

2011 IEEE International Ultrasonics Symposium

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Experimental SAW resonator structures with iridium electrodes were fabricated on Y-cut of langasite with few different propagation directions and their characteristics were measured in a wide temperature interval, up to 700ºC, and compared with simulations. Between two sets of material constants reported by Bungo one set was selected as providing much better agreement with experiments, for the analyzed orientations. Further improvement of simulation accuracy was achieved via after-correction of the calculated temperature characteristics using auxiliary function extracted from experimental data. This approach was used to predict resonator characteristics in orientation with Euler angles (0º, 22º, 90º), in which Bluestein-Gulyaev wave propagates, and provided excellent agreement between experiments and simulations, in a wide temperature interval.

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“…In early publications on Ir/LGS application for high temperature sensors combination of "lift-off" and Ir magnetron sputtering allowed preparing 200 MHz devices with very low yield [1]. Photoresist sidewall coverage by Ir was obviously preventing from increasing the working frequency.…”

Section: A Initial Approachesmentioning

confidence: 99%

Technological process and resonator design optimization of Ir/LGS high temperature SAW devices

Sakharov

Zabelin

Medvedev

et al. 2014

2014 IEEE International Ultrasonics Symposium

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Photolithography together with ion beam etching was used for fabrication of high temperature SAW devices. Ir thin film of 0.3 µm thick was deposited by magnetron sputtering without additional adhesion layers and than Ir film was annealed after electrode patterning in different conditions. The resistivity of magnetron sputtered thick Ir films drops noticeably after annealing. However, this process requires special care in order to avoid delaminating of the film due to developing high stress during such procedures. We have annealed the substrates with Ir films in different regimes and in different gas/vacuum conditions. The results of these studies have shown that annealing in air up to about 500 °C decreases the Ir film resistivity 1.5-2 times. Vacuum annealing did not show much improvement in comparison to open air annealing. Magnetron sputtered thin Ir films have somewhat porous structure allowing oxygen to diffuse from the substrate surface through Ir films. Resonator structures with thick Ir electrodes were prepared and tested. Examples of the resonator structures show very promising properties, such as high conductance and high Q-factor.

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Theoretical and experimental investigation of langasite as material for wireless high temperature SAW sensors

Cited by 27 publications

References 5 publications

C3.3 - A 600°C Wireless and Passive Temperature Sensor Based on Langasite SAW-Resonators

C3.3 - A 600°C Wireless and Passive Temperature Sensor Based on Langasite SAW-Resonators

Characterization of langasite for application in high temperature SAW sensors

Technological process and resonator design optimization of Ir/LGS high temperature SAW devices

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