C3.3 - A 600°C Wireless and Passive Temperature Sensor Based on Langasite SAW-Resonators

Wall, B.; Gruenwald, R.; Klein, Mason; Bruckner, Gudrun

doi:10.5162/sensor2015/c3.3

Cited by 6 publications

(6 citation statements)

References 13 publications

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“…Indeed, SAW sensors are passive devices, and just re-radiate a small part of the energy received from the RF interrogation signal [1,2]. Wireless SAW sensors capable of measuring temperatures up to 600-700°C already exist [3][4][5] and are based on langasite crystals (La 3 Ga 5 SiO 14 , often called LGS). The surface of these crystals shows an outstanding stability at high temperatures up to 1000°C in air atmosphere [6].…”

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confidence: 99%

Stoichiometric Lithium Niobate Crystals: Towards Identifiable Wireless Surface Acoustic Wave Sensors Operable up to 600 °C

et al. 2019

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Wireless surface acoustic wave (SAW) sensors constitute a promising solution to some unsolved industrial sensing issues taking place at high temperatures. Currently, this technology enables wireless measurements up to 600-700°C at best. However, the applicability of such sensors remains incomplete since they do not allow identification above 400°C. The latter would require the use of a piezoelectric substrate providing a large electromechanical coupling coefficient K 2 , while being stable at high temperature. In this letter, we investigate the potentiality of stoichiometric lithium niobate (sLN) crystals for such purpose. Raman spectroscopy and X-ray diffraction attest that sLN crystals withstand high temperatures up to 800°C, at least for several days. In situ measurements of sLN-based SAW resonators conducted up to 600°C show that the K 2 of these crystals remains high and stable throughout the whole experiment, which is very promising for the future achievement of identifiable wireless high-temperature SAW sensors.

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confidence: 99%

Stoichiometric Lithium Niobate Crystals: Towards Identifiable Wireless Surface Acoustic Wave Sensors Operable up to 600 °C

et al. 2019

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“…A passive wireless sensor is defined as a device that does not require an external power source for its operation and is fabricated using passive electrical components. Among the passive wireless sensing technologies, surface acoustic wave (SAW) and wireless LC resonators were evaluated for temperature sensing in harsh environmental conditions [ 1 , 30 , 31 , 32 , 33 ]. Due to the poor stability of the materials used in the fabrication of SAW sensors, they are limited to a temperature range below 600 °C [ 1 , 30 , 31 , 32 ].…”

Section: Introductionmentioning

confidence: 99%

“…Among the passive wireless sensing technologies, surface acoustic wave (SAW) and wireless LC resonators were evaluated for temperature sensing in harsh environmental conditions [ 1 , 30 , 31 , 32 , 33 ]. Due to the poor stability of the materials used in the fabrication of SAW sensors, they are limited to a temperature range below 600 °C [ 1 , 30 , 31 , 32 ]. Even though SAW sensors provide wireless interrogation over long range (>50 cm), the surface acoustic wave carrying the temperature information can be influenced by the operating environment, geometry, and any parasitic noise in the path of the acoustic waves [ 31 , 32 ].…”

Section: Introductionmentioning

confidence: 99%

“…Due to the poor stability of the materials used in the fabrication of SAW sensors, they are limited to a temperature range below 600 °C [ 1 , 30 , 31 , 32 ]. Even though SAW sensors provide wireless interrogation over long range (>50 cm), the surface acoustic wave carrying the temperature information can be influenced by the operating environment, geometry, and any parasitic noise in the path of the acoustic waves [ 31 , 32 ]. Hence, SAW sensors may not be a good choice for real-world applications where the operating environment is not ideal as presented at lab-scale testing.…”

Section: Introductionmentioning

confidence: 99%

“…Hence, SAW sensors may not be a good choice for real-world applications where the operating environment is not ideal as presented at lab-scale testing. Additionally, the piezoelectric crystals used to fabricate the SAW sensors, such as langasites, are limited to operate below 600 °C [ 31 ]. The LC resonator operation is based on the mutual inductive coupling between the sensor and an interrogator antenna.…”

Section: Introductionmentioning

confidence: 99%

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All-Ceramic Passive Wireless Temperature Sensor Realized by Tin-Doped Indium Oxide (ITO) Electrodes for Harsh Environment Applications

Idhaiam

Caswell

Pozo

et al. 2022

Sensors

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In this work, an all-ceramic passive wireless inductor–capacitor (LC) resonator was presented for stable temperature sensing up to 1200 °C in air. Instead of using conventional metallic electrodes, the LC resonators are modeled and fabricated with thermally stable and highly electroconductive ceramic oxide. The LC resonator was modeled in ANSYS HFSS to operate in a low-frequency region (50 MHz) within 50 × 50 mm geometry using the actual material properties of the circuit elements. The LC resonator was composed of a parallel plate capacitor coupled with a planar inductor deposited on an Al2O3 substrate using screen-printing, and the ceramic pattern was sintered at 1250 °C for 4 h in an ambient atmosphere. The sensitivity (average change in resonant frequency with respect to temperature) from 200–1200 °C was ~170 kHz/°C. The temperature-dependent electrical conductivity of the tin-doped indium oxide (ITO, 10% SnO2 doping) on the quality factor showed an increase of Qf from 36 to 43 between 200 °C and 1200 °C. The proposed ITO electrodes displayed improved sensitivity and quality factor at elevated temperatures, proving them to be an excellent candidate for temperature sensing in harsh environments. The microstructural analysis of the co-sintered LC resonator was performed using a scanning electron microscope (SEM) which showed that there are no cross-sectional and topographical defects after several thermal treatments.

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Temperature characteristics of SAW resonators on Sc_0.26Al_0.74N/polycrystalline diamond heterostructures

Lozano

Chen

Williams

et al. 2018

Smart Mater. Struct.

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Surface acoustic wave (SAW) resonators have been fabricated on a 2 μm scandium aluminium nitride (ScAlN) film deposited by means of pulsed-DC reactive magnetron sputtering on a 5.8 μm polycrystalline diamond substrate. Thin film characterization comprised of the assessment of the thin film texture by means of x-ray diffraction (XRD) measurements, reporting highly c-axis oriented ScAlN thin films with a full width at half maximum (FWHM) of the ω-θ scans below 2°. Compositional and piezoelectric analyses of the thin films synthesized with the sputtering parameters used in this work, namely a sputtering power of 700 W and a synthesis pressure of 0.53 Pa, have reported a thin film composition of Sc0.26Al0.74N together with a piezoelectric d33 constant of −11 pC/N. Finally, a SAW resonator has been characterized using a vector network analyser (VNA) under various substrate temperature conditions with two iterations. The resulting temperature coefficient of frequency (TCF) values show a highly linear behaviour within two temperature ranges, namely from 20 K to room temperature (300 K) (−12.5 ppm/K) as well as from 300 K up to 450 K (−34.6 ppm/K).

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C3.3 - A 600°C Wireless and Passive Temperature Sensor Based on Langasite SAW-Resonators

Cited by 6 publications

References 13 publications

Stoichiometric Lithium Niobate Crystals: Towards Identifiable Wireless Surface Acoustic Wave Sensors Operable up to 600 °C

Stoichiometric Lithium Niobate Crystals: Towards Identifiable Wireless Surface Acoustic Wave Sensors Operable up to 600 °C

All-Ceramic Passive Wireless Temperature Sensor Realized by Tin-Doped Indium Oxide (ITO) Electrodes for Harsh Environment Applications

Temperature characteristics of SAW resonators on Sc_0.26Al_0.74N/polycrystalline diamond heterostructures

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C3.3 - A 600°C Wireless and Passive Temperature Sensor Based on Langasite SAW-Resonators

Cited by 6 publications

References 13 publications

Stoichiometric Lithium Niobate Crystals: Towards Identifiable Wireless Surface Acoustic Wave Sensors Operable up to 600 °C

Stoichiometric Lithium Niobate Crystals: Towards Identifiable Wireless Surface Acoustic Wave Sensors Operable up to 600 °C

All-Ceramic Passive Wireless Temperature Sensor Realized by Tin-Doped Indium Oxide (ITO) Electrodes for Harsh Environment Applications

Temperature characteristics of SAW resonators on Sc0.26Al0.74N/polycrystalline diamond heterostructures

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Temperature characteristics of SAW resonators on Sc_0.26Al_0.74N/polycrystalline diamond heterostructures