Comparison between Ir, Ir0.85Rh0.15 and Ir0.7Rh0.3 thin films as electrodes for surface acoustic waves applications above 800 °C in air atmosphere

Taguett, Amine; Aubert, Thierry; Elmazria, O.; Bartoli, Florian; Lomello, Marc; Hehn, Michel; Ghanbaja, Jaâfar; Boulet, Pascal; Mangin, Stéphane; Xu, Yong

doi:10.1016/j.sna.2017.09.031

Cited by 12 publications

(4 citation statements)

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“…For high temperature operation described in present publications the authors chose high melting temperature noble metals that are most often based on pure Pt or Pt based alloys and compounds [19], or on Ir and its alloys including Ir-Rh alloys [20]. Some useful cases have been demonstrated but further studies are still required in this field.…”

Section: Electrode Materials Selectionmentioning

confidence: 99%

High-Temperature SAW Resonator Sensors: Electrode Design Specifics

Zhgoon

Shvetsov

Sakharov

et al. 2018

IEEE Trans. Ultrason., Ferroelect., Freq. Contr.

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Surface acoustic wave (SAW) sensors are steadily paving the way to wider application areas. Their main benefit consisting in the possibility of wireless interrogation with the radio frequency interrogation signal being the only energy source for the reradiated signal. This feature is getting more and more attractive with the growing demand in monitoring multiple industrial objects difficult to access by wired sensors in harsh environments. Among such wider applications, the possibility of making measurements of temperature, deformation, vibrations, and some other parameters at temperatures in the range of 300 °C-1000 °C look quite promising. This paper concentrates on specific features of the SAW resonator-based sensors operation at this temperature range. High-temperature influences the material choice and thus the properties of SAW resonators design peculiarities intended for use at high temperature. It is suggested that preferable designs should use synchronous resonators with relatively thick electrodes (10% of wavelength) based on Ir or Pt alloys while benefiting from the possibilities of specific designs that could reduce the negative impact of thick electrodes on the manufacturing in quantity. This solution benefits from lower resonance frequency scatter because of the automatic compensation of SAW velocity decrease due to electrode metallization ratio increase. This compensation originates from the resonance frequency increase that is related to the decrease of the Bragg bandwidth defined by the reflection. It is shown in modeling examples that the value of metallization ratio at which this compensation occurs is close to 65%-70%.

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Section: Electrode Materials Selectionmentioning

confidence: 99%

High-Temperature SAW Resonator Sensors: Electrode Design Specifics

Zhgoon

Shvetsov

Sakharov

et al. 2018

IEEE Trans. Ultrason., Ferroelect., Freq. Contr.

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“…Depending on the applied metallization and substrate, additional barrier and cover layers might be required to prevent a chemical reaction between the substrate and the metallization or the metallization and the surrounding atmosphere. In contrast to investigations reported in the literature, which are mainly restricted to electrode materials based on noble metals such as Pt, Pd, or Ir [1][2][3][4][5][6][7][8][9][10], we developed high-temperature stable electrode systems made of the intermetallics TiAl [11,12] or RuAl on Ca 3 TaGa 3 Si 2 O 14 (CTGS) substrates [13][14][15]. In combination with suited cover layers, these metallizations provide sufficient oxidation resistance at high temperatures.…”

Section: Introductionmentioning

confidence: 99%

Study of the Long-Term High-Temperature Structural Stability of RuAl Electrodes for Microelectronic Devices

Seifert,

Leszczynska,

Gemming

2024

Materials

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The high-temperature stability of RuAl-based electrodes for application in microelectronic devices is analyzed for long-term duration. The electrodes are prepared on Ca3TaGa3Si2O14 (CTGS) substrates using SiO2 and Al-N-O cover and barrier layers as oxidation protection. The samples are annealed at 600, 700, or 800 °C in air for 192 h. Minor degradation is observed after thermal loading at 700 °C. The annealing at 800 °C for 192 h leads to a partial oxidation of the Al in the extended contact pad and to a complete oxidation of the Al within the structured interconnect electrodes. The different degradation of the interconnect electrodes and the contact pads is caused by their different lateral dimensions. In summary, long-term high-temperature stability is demonstrated up to at least 700 °C in air. Less oxidizing atmospheres should allow the application at higher temperatures and for a significantly longer duration.

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“…For the application of such sensors at high temperatures, a suitable metallization with a high thermo-mechanical stability, a low electrical resistivity, and a high oxidation and corrosion resistance, as well as a high temperature stable piezoelectric substrate are required. Several metallization systems have been investigated during the last few years concerning their high temperature stability, e.g., Pt-or Ir-based materials [1][2][3][4], oxide dispersion hardened materials [5,6], or refractory metals [7].…”

Section: Introductionmentioning

confidence: 99%

High Temperature Behavior of RuAl Thin Films on Piezoelectric CTGS and LGS Substrates

Seifert

2020

Materials

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This paper reports on a significant further improvement of the high temperature stability of RuAl thin films (110 nm) on the piezoelectric Ca 3 TaGa 3 Si 2 O 14 (CTGS) and La 3 Ga 5 SiO 14 (LGS) substrates. RuAl thin films with AlN or SiO 2 cover layers and barriers to the substrate (each 20 nm), as well as a combination of both were prepared on thermally oxidized Si substrates, which serve as a reference for fundamental studies, and the piezoelectric CTGS, as well as LGS substrates. In some films, additional Al layers were added. To study their high temperature stability, the samples were annealed in air and in high vacuum up to 900 °C, and subsequently their cross-sections, phase formation, film chemistry, and electrical resistivity were analyzed. It was shown that on thermally oxidized Si substrates, all films were stable after annealing in air up to 800 °C and in high vacuum up to 900 °C. The high temperature stability of RuAl thin films on CTGS substrates was improved up to 900 °C in high vacuum by the application of a combined AlN/SiO 2 barrier layer and up to 800 °C in air using a SiO 2 barrier. On LGS, the films were only stable up to 600 °C in air; however, a single SiO 2 barrier layer was sufficient to prevent oxidation during annealing at 900 °C in high vacuum.

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Comparison between Ir, Ir0.85Rh0.15 and Ir0.7Rh0.3 thin films as electrodes for surface acoustic waves applications above 800 °C in air atmosphere

Cited by 12 publications

References 11 publications

High-Temperature SAW Resonator Sensors: Electrode Design Specifics

High-Temperature SAW Resonator Sensors: Electrode Design Specifics

Study of the Long-Term High-Temperature Structural Stability of RuAl Electrodes for Microelectronic Devices

High Temperature Behavior of RuAl Thin Films on Piezoelectric CTGS and LGS Substrates

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