Thermally driven microgripper as a tool for micro assembly

Ivanova, K.; Ivanov, Tzvetan; Ali, Badar; Volland, Burkhard E.; Rangelow, Ivo W.; Andrijasevic, D.; Sumecz, F.; Fischer, Stephanie; Spitzbart, Manfred; Brenner, W.; Kostic̆, I.

doi:10.1016/j.mee.2006.01.072

Cited by 46 publications

(29 citation statements)

References 7 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Ivanova et al [6] fabricated a micro-gripper using single crystal bulk silicon with the help of thermal actuation methods. A pair of electro-thermal actuators was used along with the bimorph effect for gripping.…”

Section: Gripping Techniques For Micro-part Manipulationmentioning

confidence: 99%

A review of micro-devices assembly techniques and technology

Cecil

Kumar

Lü

et al. 2015

Int J Adv Manuf Technol

View full text Add to dashboard Cite

This paper provides a review of techniques and technology relevant to the field of micro-devices assembly (MDA). MDA is an emerging domain of importance which is expected to have a substantial impact on a range of industrial fields including sensors, surveillance devices, and semiconductor devices. This paper provides a review of a cross-section of research including micro-gripping design and manipulation techniques, work cell design and factory automation, selfassembly techniques, and virtual reality-based approaches in micro-assembly. A discussion of the key challenges for this domain along with directions for future research is also provided.

show abstract

Section: Gripping Techniques For Micro-part Manipulationmentioning

confidence: 99%

A review of micro-devices assembly techniques and technology

Cecil

Kumar

Lü

et al. 2015

Int J Adv Manuf Technol

View full text Add to dashboard Cite

show abstract

“…A model for a thermally driven micro gripper as a tool for micro handling and assembly was first introduced by Ivanova et al (2006). Since 2005, some improvements in terms of design (lever transmission and efficiency) and performance have been made, and new prototypes of the gripper have been developed.…”

Section: Introductionmentioning

confidence: 99%

Characterization of an electro-thermal micro gripper and tip sharpening using FIB technique

et al. 2010

View full text Add to dashboard Cite

A micromachined electro-thermal gripper, first introduced by Ivanova et al. (Microelectron Eng 83:1393-1395, represents a promising candidate for the manipulation and handling of micro or even nano-scaled objects. To further optimize the performance of the device, a detailed electrical and mechanical characterization is needed. Due to the so-called duo-action gripper approach (i.e., a separate actuator for closing and opening action) these investigations focused on the maximum (minimum) opening width being 11.5 lm (3.3 lm), while in rest position a value of 4 lm is feasible. The maximum, electrical input power is limited to 80 mW/actuator element, resulting in a current density of up to 1.27 MA cm -2 in the corresponding metal layers. When applying, however, larger current densities the probability of device failure increases substantially as in combination with an enhanced temperature of about 200°C electromigration effects occur in the metallization. Furthermore, the cut-off frequency and parasitic effects during actuation such as the z-deflection and the increase in length of each arm both showing values of up to 3 lm have been investigated as a function of operation parameters. Finally, the tips of the gripper were sharpened using Focused Ion Beam technique to a radius of less than 1 lm for gripping operations in space-restricted environments or for the manipulation or handling of sub-lm scaled objects.

show abstract

“…Different mechanisms of actuation have been used for microgripper applications such as piezoelectric [1], electrostatic [2][3][4], SMA [5] or electrothermal [6][7][8][9][10]. Amongst them, electrothermal actuation is the preferred mechanism for biological purposes since it is able to produce large deflections at low activation voltages.…”

Section: Introductionmentioning

confidence: 99%