The study of internal friction in nanocrystalline Ag and Au thin films

Hsu, Feng-Chih; Wang, Yuting; Cheng, Ya-Chi; Tong, Chi-Jia; Lin, Ming-Tzer

doi:10.1016/j.tsf.2014.03.016

Cited by 6 publications

(2 citation statements)

References 25 publications

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“…Decreasing the percentage of constricted grain boundaries promoted a thickness-dependent increase in the energy loss of Al films. These results are consistent with others [ 7 , 29 , 30 ] indicating that the grain sizes and grain boundary density strongly affect the internal friction and energy loss of the films.…”

Section: Discussionsupporting

confidence: 93%

Size Effects in Internal Friction of Nanocrystalline Aluminum Films

et al. 2021

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Al thin film is extensively used in micro-electromechanical systems (MEMS) and electronic interconnections; however, most previous research has concentrated on their quasi-static properties and applied their designs on larger scales. The present study designed a paddle-like cantilever specimen with metal films deposited on the upper surface to investigate the quasi-static properties of Al thin film at room temperature under high vacuum conditions at microscopic scales. Energy loss was determined using a decay technique in the oscillation amplitude of a vibrating structure following resonant excitation. Grain size and film thickness size were strictly controlled considering the quasi-static properties of the films. This study found that the internal friction of ultra-thin and thin Al films was more dependent on the grain boundaries than film thickness.

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Section: Discussionsupporting

confidence: 93%

Size Effects in Internal Friction of Nanocrystalline Aluminum Films

et al. 2021

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“…Different materials obtained as thin films by means of physical or chemical vapor deposition methods or other technologies can be used for manufacturing microelectronic and microelectromechanical systems (MEMS). Aluminum [1][2][3][4][5][6], gold [7][8][9][10][11][12] and silver [13][14][15][16][17][18] are used in microelectronics and MEMS due to their physical, optical, mechanical, electric and/or magnetic characteristics. Even though the density of these three materials differs significantly from each other: 2.69 g/cm 3 (for aluminum) and 19.32 g/cm 3 (for gold), their Vickers hardness is quite close (15 HV to 25 HV).…”

Section: Introductionmentioning

confidence: 99%

Nanocharacterization of metallic thin films deposited on different substrates

Merie

Burnete

Bîrleanu

et al. 2020

Materials Science-Poland

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The purpose of this study was to determine the influence of different substrates (C45 steel, polycarbonate, glass) on the topography as well as tribological and mechanical properties (nanohardness, modulus of elasticity and friction force) of aluminum, gold and silver thin films. The 3D image analysis showed a strong influence of the substrate material on the topography of the studied thin films with no certain variation rule. Using the Oliver and Pharr method for determining nanohardness it was observed that, the smallest values were obtained for the thin films deposited on plastic substrate, followed by glass and C45 steel, regardless of the deposited material. The determination of the modulus of elasticity was done using the Hertzian method. The obtained results showed that the highest values of this parameter were obtained for the films deposited on plastic substrate, while the lowest values depended on both the deposited material and substrate. Friction force analysis for aluminum and gold showed a significant impact of the substrate material, with more constant values for gold. As a consequence, one must pay a particular attention when choosing the material for the substrate on which the thin films are deposited.

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Effects of surface composite structure with micro-grooves and Sn-Ag-Cu on reducing friction and wear of Ni3Al alloys

Shi

Zhang

et al. 2020

Surface and Coatings Technology

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The study of internal friction in nanocrystalline Ag and Au thin films

Cited by 6 publications

References 25 publications

Size Effects in Internal Friction of Nanocrystalline Aluminum Films

Size Effects in Internal Friction of Nanocrystalline Aluminum Films

Nanocharacterization of metallic thin films deposited on different substrates

Effects of surface composite structure with micro-grooves and Sn-Ag-Cu on reducing friction and wear of Ni3Al alloys

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