2005
DOI: 10.1016/j.jallcom.2004.10.077
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The influence of lattice parameter variation on microstructure of GaN single crystals

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Cited by 36 publications
(27 citation statements)
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“…A GaN single crystal (5 mm × 5 mm × 1 mm) with extremely low dislocation density (<10 4 cm −2 ) was grown by TopGaN Co., which applied the HVPE (Hydride Vapor Phase Epitaxy) method [27][28][29][30]. The largest surface of the crystal was confirmed to be C (0001) plane by X-ray diffractions, and nanoindentation tests were performed on the surface with the Hysitron TriboIndenter system (the details of the apparatus reported in [31]).…”
Section: Methodsmentioning
confidence: 99%
“…A GaN single crystal (5 mm × 5 mm × 1 mm) with extremely low dislocation density (<10 4 cm −2 ) was grown by TopGaN Co., which applied the HVPE (Hydride Vapor Phase Epitaxy) method [27][28][29][30]. The largest surface of the crystal was confirmed to be C (0001) plane by X-ray diffractions, and nanoindentation tests were performed on the surface with the Hysitron TriboIndenter system (the details of the apparatus reported in [31]).…”
Section: Methodsmentioning
confidence: 99%
“…[42] The incorporation of oxygen into the lattice and resulting generation of free electrons will also contribute to an expansion of the lattice constants. [40,[62][63][64] While this may not negatively impact thin film epitaxial layers grown on these substrates, thick, bulk growth may be challenging as minor lattice constants mismatch may lead to substantial strain buildup in the thick boules resulting in energy release via crack formation. This will be discussed in more detail in Section 3.2.…”
Section: Progress Reportmentioning
confidence: 99%
“…5) suffer from the uncertainties in the elastic constants and differ between each other depending on the assumption made, remaining smaller than the lattice parameters of the HVPE bulk GaN. Furthermore, homoepitaxial HVPE-GaN grown on HP-GaN was reported to have smaller lattice parameters than the HP-GaN substrate [22]. This may suggest that specific growth conditions and the choice of substrate may also affect the lattice parameters.…”
Section: Comparison With Hp Bulk Ganmentioning
confidence: 99%
“…The lattice parameters of HP bulk GaN and homoepitaxial GaN have been extensively studied [15,[20][21][22]. The GaN crystals grown by the HP method exhibit a very low dislocation density ð10 2 -10 4 cm À2 Þ, but typically show a high free-electron concentration 410 19 cm À3 (related to high O incorporation) [20,21].…”
Section: Introductionmentioning
confidence: 99%