2010
DOI: 10.3923/jas.2010.2136.2146
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The Future of Non-planar Nanoelectronics MOSFET Devices: A Review

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Cited by 19 publications
(13 citation statements)
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“…All the mentioned techniques fall under hydrothermal synthesis and one of the preferred methods is atomic layer deposition (ALD). The ALD process is capable of producing highly conformal and quality films [21]. The process is cyclic and is based on the number of reactants.…”
Section: Growth Techniques Of Znomentioning
confidence: 99%
“…All the mentioned techniques fall under hydrothermal synthesis and one of the preferred methods is atomic layer deposition (ALD). The ALD process is capable of producing highly conformal and quality films [21]. The process is cyclic and is based on the number of reactants.…”
Section: Growth Techniques Of Znomentioning
confidence: 99%
“…3 To sustain historical device scaling and mitigate unfavorable SCEs, nonconventional and nonplanar device architectures have been reported to provide enhanced channel control. 4 Multigate MOSFETs on the concept of volume inversion of charge provides enhanced carrier mobility, better I ON /I OFF ratio, and are widely recognized as one of the promising candidates to meet the predictions of International Technology Roadmap for Semiconductor (ITRS). 5 Trigate MOSFET has been reported to boost the device performance at nanoscale as these devices enable better gate control over the channel and optimal subthreshold characteristics.…”
Section: Introductionmentioning
confidence: 99%
“…Double-gate MOSFET's structure has been proven to be less sensitive to SCE mainly because of its excellent electrostatic control over the channel region [8][9][10][11]. The mobility of the electrons/holes within the conductive channel are improved due to its excellent gate control that allows a significant amount of volume inversion [12]. The current drivability in the double-gate structure can be improved without having any increment in the area by simply etching the silicon body a lot more thinner [13,14].…”
Section: Introductionmentioning
confidence: 99%