The First Frequency-Modulated (FM) Pitch Gyroscope

Zega, Valentina; Minotti, Paolo; Mussi, Giorgio; Tocchio, Alessandro; Falorni, Luca; Facchinetti, Stefano; Bonfanti, Andrea; Lacaita, A.L.; Comi, Claudia; Langfelder, Giacomo; Corigliano, Alberto

doi:10.3390/proceedings1040393

Cited by 6 publications

(2 citation statements)

References 4 publications

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“…Under these hypotheses, by substituting equations ( 16) into (15) and dividing the three equations for e iϕx , e iϕy and e iϕz respectively, three complex equations are obtained. By nulling both the real and the imaginary parts, it is possible to obtain an expression forȦ x ,Ȧ y ,Ȧ z , ω 2…”

Section: Ideal Gyroscopementioning

confidence: 99%

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A new MEMS three-axial frequency-modulated (FM) gyroscope: a mechanical perspective

Zega

Comi

Minotti

et al. 2018

European Journal of Mechanics - A/Solids

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Micro-Electro-Mechanical Systems (MEMS) gyroscopes are inertial sensors for the measurement of angular rates. They have a variety of applications from consumer electronics to drones and the need of stability against environmental fluctuations, such as temperature, is a key factor in order to avoid expensive calibration procedures.Frequency Modulation (FM) has been recently proposed as an innovative working principle for MEMS gyroscopes and as the desired solution in terms of stability against environmental fluctuations.In this paper, the FM working principle is formalized for the three-axial case for the first time and the governing equations are derived both in the idealized case of a point-mass gyroscope and in the real case of a distributed-mass gyroscope. Moreover, the mechanical structure of the first three-axial MEMS FM gyroscope is proposed and studied. Preliminary experimental measurements prove the validity of both the model and the simulations results employed during the design process. The proposed structure overcomes lots of the constraints of the surface micromachining fabrication processes and represents an important step towards the development of a new class of MEMS gyroscopes.

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Section: Ideal Gyroscopementioning

confidence: 99%

“…Yaw FM gyroscopes were firstly proposed and experimentally tested by the Berkeley Sensors and Actuators Center (see e.g. [13] and [14]), while pitch and roll FM gyroscopes were presented for the first time by the authors in [15] and [16].…”

Section: Introductionmentioning

confidence: 99%

A new MEMS three-axial frequency-modulated (FM) gyroscope: a mechanical perspective

Zega

Comi

Minotti

et al. 2018

European Journal of Mechanics - A/Solids

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Highly sensitive MEMS frequency modulated accelerometer with small footprint

Moreira

Kuhlmann

Alves

et al. 2020

Sensors and Actuators A: Physical

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A single-axis resonant MEMS accelerometer is presented here. The goal is to achieve the maximum sensitivity on a set of predefined constraints: small footprint of 500 m × 500 m, vacuum operation under 150 Pa (requirement for a single-chip IMU) and fabrication using a Bosch silicon surface micromachining process. The sensor is composed by double-ended tuning fork resonators in differential architecture and a force amplification mechanism to increase its sensitivity. A complete characterization of the device was performed including closed-loop operation. A proportional-integral-derivative closed-loop controller architecture updates in real-time the excitation frequency to half the resonance frequency of the resonators. A scale-factor of 170 Hz/g and a non-linearity of 0.63 %FS (operation range of ±1 g) were experimentally measured. The relative sensitivities of 0.08 %Hz/g/nkg and 0.48 %Hz/g are among the highest reported for DETF-based devices. Long-term (700 g/ √ Hz noise floor measured), dynamic and thermal drift measurements are also reported. The differential operation improved the thermal performance by 77 %.

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