A new MEMS three-axial frequency-modulated (FM) gyroscope: a mechanical perspective

Zega, Valentina; Comi, Claudia; Minotti, Paolo; Langfelder, Giacomo; Falorni, Luca; Corigliano, Alberto

doi:10.1016/j.euromechsol.2018.02.005

Cited by 25 publications

(10 citation statements)

References 20 publications

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“…Minotti et al [ 67 ] demonstrated a Lissajous frequency-modulated gyroscope with high scale factor stability. The same kind of three-axis Lissajous frequency-modulated gyroscope developed by Zega et al [ 95 ] showed a relatively easy implementation in the roll/pitch axis because it does not require perfect mode matching.…”

Section: Reliability Issuesmentioning

confidence: 99%

A Review of MEMS Vibrating Gyroscopes and Their Reliability Issues in Harsh Environments

Gill

Howard

Mazhar

et al. 2022

Sensors

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Micro-electromechanical systems (MEMS) vibrating gyroscopes have gained a lot of attention over the last two decades because of their low power consumption, easy integration, and low fabrication cost. The usage of the gyroscope equipped with an inertial measurement unit has increased tremendously, with applications ranging from household devices to smart electronics to military equipment. However, reliability issues are still a concern when operating this inertial sensor in harsh environments, such as to control the movement and alignment of mini-satellites in space, tracking firefighters at an elevated temperature, and assisting aircraft navigation in gusty turbulent air. This review paper focuses on the key fundamentals of the MEMS vibrating gyroscopes, first discussing popular designs including the tuning fork, gimbal, vibrating ring, and multi-axis gyroscopes. It further investigates how bias stability, angle random walk, scale factor, and other performance parameters are affected in harsh environments and then discusses the reliability issues of the gyroscopes.

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Section: Reliability Issuesmentioning

confidence: 99%

A Review of MEMS Vibrating Gyroscopes and Their Reliability Issues in Harsh Environments

Gill

Howard

Mazhar

et al. 2022

Sensors

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“…The ambient light sensor can automatically adjust the brightness of the screen according to the ambient illumination. Gyroscopes, accelerometers, GPS, and geomagnetic sensors are also included.…”

Section: Design and Implementation Of The Sewmsmentioning

confidence: 99%

SEWMS: An edge‐based smart wearable maintenance system in communication network

Rui

Qin

et al. 2019

Softw Pract Exp

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Summary The development of the Internet of Things (IoT) and wearable technology provides an opportunity for the development of maintenance of communication. The use of wearable technology and instant messaging technology of IoT can improve the support capabilities and data interaction ability of on‐site maintenance of the communication network. Existing communication maintenance systems lack real‐time operation and maintenance of data interaction. In the field operation decision‐making and execution process, there are problems of lack of field links and inconvenient information interaction. On‐site maintenance mainly relies on maintenance personnel to actively search for information, and the retrieval results are lacking of personalization, which makes it difficult to meet the needs of on‐site maintenance of the communication network. Edge computing and information push technology can solve these problems to some extent. In this paper, we focus on the current low level in information, complicated scenes, and various information of on‐site maintenance and propose a dynamic context‐aware information push algorithm. The simulation results demonstrate that the algorithm delivers good performance in terms of precision, recall, and F1. Besides, we present a smart wearable maintenance system, an edge computing–assisted IoT platform for the real‐time guidance of technical experts and systems for on‐site maintenance personnel, aiming to improve the efficiency and quality of on‐site maintenance.

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“…Micro-electro-mechanical systems (MEMSs) are smaller in size in comparison with traditional mechatronic systems. They are widely used in medicine, military fields, and our daily life [1][2][3]. They have high requirements in parts, not only small size but also complex microstructures [4,5].…”

Section: Introductionmentioning

confidence: 99%

Micro Electrochemical Machining of Array Micro-Grooves Using In-Situ Disk Electrode Fabricated by Micro-WEDM

Wang

Zhang

et al. 2020

Micromachines

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This paper develops an array micro-grooves manufacturing method using micro electrochemical machining (ECM) with disk electrode, which is prepared by in-situ micro wire electrical discharge machining (WEDM). This technology focuses on the difficulty of array structure manufacture in micro-electro-mechanical systems (MEMS). A micro-ECM system is built based on the micro-WEDM machine to achieve high precision processing of the array micro-grooves. Since micro-WEDM has good performance in high precision machining of the rotating structure, single and multi-edge disk electrodes can be fabricated in-situ using graphite. The as-prepared disk tool electrode is directly used for micro-electrochemical milling of the array micro-grooves without disassembling away from the device, which avoids the positioning error caused by the re-clamping of the disk electrode. With the advantages of high surface quality and no electrode loss, micro-ECM improves the manufacture performance of the micro-parts. Through wire path optimization, the shape accuracy of the disk edge is improved. After the research of the micro-ECM parameters, the process is improved, and finally, the high precision array micro-grooves are obtained. This method combines the advantages of micro-WEDM and disk electrode micro-ECM milling, and it is convenient for large-scale manufacture of array micro-structures on micro-parts and MEMS.

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A new MEMS three-axial frequency-modulated (FM) gyroscope: a mechanical perspective

Cited by 25 publications

References 20 publications

A Review of MEMS Vibrating Gyroscopes and Their Reliability Issues in Harsh Environments

A Review of MEMS Vibrating Gyroscopes and Their Reliability Issues in Harsh Environments

SEWMS: An edge‐based smart wearable maintenance system in communication network

Micro Electrochemical Machining of Array Micro-Grooves Using In-Situ Disk Electrode Fabricated by Micro-WEDM

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