Highly sensitive MEMS frequency modulated accelerometer with small footprint

Moreira, Eurico Esteves; Kuhlmann, Burkhard; Alves, Filipe; Dias, Rosana A.; Cabral, Jorge; Gaspar, J.; Rocha, Luís A.

doi:10.1016/j.sna.2020.112005

Cited by 4 publications

(2 citation statements)

References 29 publications

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“…Due to changes in the overall effective stiffness, induced acceleration in FM accelerometers alters the device’s resonance frequency. FM accelerometers are built using two identical silicon MEMS tuning fork resonators with two mechanical degrees of freedom: in-phase and anti-phase motion of the connected tines (Esteves et al, 2020; Langfelder et al, 2019; Trusov et al, 2013). The resonator’s anti-phase mode is dynamically balanced, which prevents energy loss brought on by angular and linear substrate vibrations.…”

Section: State-of-the-art Solutions To Vrementioning

confidence: 99%

Multimode TED-tuned beam mass damper for low-g capacitive MEMS accelerometers VRE reduction

Odira,

Keraita,

Byiringiro

2023

Journal of Vibration and Control

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Capacitive Micro-Electro-Mechanical Systems (MEMS) accelerometers for quasi-static applications are susceptible to vibration rectification error (VRE) when the ambient AC vibration signals get rectified to DC. Studies to mitigate the VRE have relied on the sigma-delta filtering algorithm with closed-loop feedback as well as the adoption of vibration-insensitive frequency modulation (FM) instead of conventional amplitude modulation. In this study, we propose a novel solution to VRE caused by asymmetric railing introducing multimode thermoelastic damping (TED) tuned beam mass damper (TBMD) integrated into the MEMS accelerometer effectively functioning as a compensator. Our contribution breaks through the microfabrication limitation of damping elements by utilizing intrinsic TED in MEMS material. The damper elements were alternately tuned up to the third flexural mode due to MEMS manufacturing constraints. This was done through parametric sweeps in numerical simulations on single-axis capacitive MEMS accelerometer integrated with multimode TED-damped TBMD. According to simulation results, the higher the mode shapes of the TED-damped tuned beam mass damper, the higher the damping effect and the better the vibration rectification factor.

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Section: State-of-the-art Solutions To Vrementioning

confidence: 99%

Multimode TED-tuned beam mass damper for low-g capacitive MEMS accelerometers VRE reduction

Odira,

Keraita,

Byiringiro

2023

Journal of Vibration and Control

View full text Add to dashboard Cite

show abstract

“…Therefore, the bending moment function (Msj(x)) for the jth partition of the resonator is estimated through (15) as:…”

Section: A First Bending Resonant Frequencymentioning

confidence: 99%

Analytical Modeling of the Mechanical Behavior of MEMS/NEMS-Multilayered Resonators With Variable Cross-Sections for Sensors and Energy Harvesters

et al. 2021

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Resonators based on micro and nanoelectromechanical systems (MEMS/NEMS) are used in many applications, including biological and gas sensors, magnetic field sensors, RF switches, accelerometers, piezoelectric micro and nanogenerators, and viscosity sensors. The design of these resonators requires analytical models to predict their mechanical behavior and optimize the sensitivity and resolution. However, most of these models are only applied to resonators with rectangular and uniform cross-sections. In this paper, we present the analytical modeling to determine the first bending resonant frequency, out-of-plane deflections, and normal stresses of MEMS/NEMS-based multilayered resonators with variable cross-sections and multiple fixed supports. The proposed modeling is derived using the well-known Rayleigh and Macaulay methods, as well as the Euler-Bernoulli beam theory. This analytical modeling is applied to four multilayered resonators with different clamped supports and non-uniform cross-sections. The results of our analytical modeling agree well with respect to those of finite element method (FEM) models and experimental data reported in the literature. The proposed analytical modeling can be used to estimate the frequency shift of resonators due to variations of their geometric parameters, number of clamped-supports or mechanical properties of the materials. Furthermore, this modeling can be used to obtain optimal designs of resonators that ensure safe operations and enhanced performance for sensors and energy harvesters in telecommunications, automotive sector, aerospace industry, consumer electronics, non-destructive testing, and navigation.

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3D Printing-Assisted Soft Capacitive Inclinometers for Simultaneous Monitoring of Tilt Angles and Directions

et al. 2022

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This study presents capacitive-type inclinometers composed of flexible polymer pillars and dome-shaped roof frames that were manufactured using the three-dimensional (3D) printing method. Polylactic acid (PLA) filaments and acrylonitrile butadiene styrene (ABS) filaments were printed by the fused deposition modeling type 3D printer to fabricate the dome-shaped roof frames and the polymer curing molds, respectively. The operating principle of the inclinometer was to detect the change in capacitance between the helix-shaped electrode coiled around the polymer pillar and the built-in electrode in the roof frame. When the inclinometer was tilted, the polymer pillar was bent, and the physical distance between each electrode was changed with respect to the tilt angle and direction. Therefore, the tilt angles and directions were simultaneously estimated by distinguishing the capacitance and peak capacitance, respectively. The results of the experiments revealed that the inclinometer using the polymer pillar that was electrically connected to a standard weight and the roof frame with a roof angle of 45 • exhibited a higher sensitivity (1.391 pF at a tilt angle of 40 • ) compared to those using roof angles of 90 • and 135 • . This study supports the use of 3D printing technology for the facile manufacturing of inclinometers that can detect tilt angles and directions simultaneously, which is not achievable with conventional inclinometers.INDEX TERMS 3D printing, inclinometer, capacitive, polymer, rapid prototyping.

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Highly sensitive MEMS frequency modulated accelerometer with small footprint

Cited by 4 publications

References 29 publications

Multimode TED-tuned beam mass damper for low-g capacitive MEMS accelerometers VRE reduction

Multimode TED-tuned beam mass damper for low-g capacitive MEMS accelerometers VRE reduction

Analytical Modeling of the Mechanical Behavior of MEMS/NEMS-Multilayered Resonators With Variable Cross-Sections for Sensors and Energy Harvesters

3D Printing-Assisted Soft Capacitive Inclinometers for Simultaneous Monitoring of Tilt Angles and Directions

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