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This paper reports the developments towards an integrated, triaxial, frequency-modulated, consumergrade, MEMS gyroscope. A custom low-power (160 µA), low-phase-noise integrated circuit is designed specifically for frequency-modulated operation. Both yaw-and pitchrate sensing systems are demonstrated, by coupling the circuit with two novel micromachined structures fabricated with a 24-µm-thick industrial process. In operation, both gyroscopes show a repeatable and stable scale factor, with less than 0.55% of part-to-part variability, obtained without any calibration, and 35 ppm/ • C of variability over a 25 • to 70 • C temperature range.

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