2005
DOI: 10.1109/mcd.2005.1388765
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The end of CMOS scaling

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Cited by 381 publications
(107 citation statements)
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“…1,2 The major bottlenecks are the short-channel effects and the inability to reduce the operation voltage. 3 In recent years, there has been a drive to explore new channel materials that can conceivably extend conventional device scaling.…”
mentioning
confidence: 99%
“…1,2 The major bottlenecks are the short-channel effects and the inability to reduce the operation voltage. 3 In recent years, there has been a drive to explore new channel materials that can conceivably extend conventional device scaling.…”
mentioning
confidence: 99%
“…But as a result, the influence of the drain on the channel also competes more and more with that of the gate, leading to the occurring of SCEs with an increased leakage current, degraded subthreshold swing and a reduced output resistance. For shorter channel c-Si MOSFETs, making thinner gate dielectric layer is important to maintain the strong electrostatic control of the channel from the gate, and various junction and doping technologies such as ultra-shallow junctions, halo implantation and lightly doped source/drain are also introduced to provide SCE suppression (14). Contrarily, for TFTs, it is very difficult to process high quality and very thin dielectric layer efficiently with high yield over large areas, and complicated junction and doping technologies are also not applicable.…”
Section: Device Structures To Suppress Short-channel Effectsmentioning
confidence: 99%
“…In this modern world of technology, where unlimited functions need to be done using limited resources so a lot ofresources and work force is devoted to miniaturization of a transistor so-called "Scaling" [1] Scaling affects the density, speed, functionality, power dissi-pation and cost of an IC [2,3] According to Moore's law transistor is considered as a fundamental element of a digital IC. Now a days scaling reachedpractical limits where it cannot retains the original characteristic due to the presence of short channel effects(SCEs).Due to SCEs devices power dissipation increases.…”
Section: Introductionmentioning
confidence: 99%