“…But as a result, the influence of the drain on the channel also competes more and more with that of the gate, leading to the occurring of SCEs with an increased leakage current, degraded subthreshold swing and a reduced output resistance. For shorter channel c-Si MOSFETs, making thinner gate dielectric layer is important to maintain the strong electrostatic control of the channel from the gate, and various junction and doping technologies such as ultra-shallow junctions, halo implantation and lightly doped source/drain are also introduced to provide SCE suppression (14). Contrarily, for TFTs, it is very difficult to process high quality and very thin dielectric layer efficiently with high yield over large areas, and complicated junction and doping technologies are also not applicable.…”