We evaluated the electrical properties of InGaN‐based light‐emitting diodes (LEDs) with a surperlattice (SL) layer just below the MQWs for forming V‐shaped pits (V‐pits) on underlying GaN substrates with different dislocation densities (DDs). The SL was effective for improving the EL intensity for all the LEDs with different DDs. However, the improvement ratio decreased with decreasing DD. The SL is effective for performance improvement of the LEDs with high DDs. (© 2015 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)