The effect of diffusion and overhangs/vacancies on the microstructure of zig-zag thin film

Qi, H.; Shao, Jian; Zhang, D.P.; Yao, Kui; Fan, Zhengxiu

doi:10.1016/j.apsusc.2006.06.043

Cited by 7 publications

(2 citation statements)

References 11 publications

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“…The results showed that the refractive index decreases with increasing glancing angle. The minimum refractive index is found to be 2.03 for the helical CuIn 5 S 8 film A C C E P T E D M A N U S C R I P T ACCEPTED MANUSCRIPT 13 deposited at an angle of 85°. The Urbach energy was found to increase from 0.29 to 0.5 eV as α rises from 0° to 85° which may be correlated with an increase of the density of defects in the highest porous structures.…”

Section: Resultsmentioning

confidence: 95%

Investigation of growth and characterization of nanostructured CuIn5S8 thin films produced by glancing angle deposition

et al. 2015

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Section: Resultsmentioning

confidence: 95%

Investigation of growth and characterization of nanostructured CuIn5S8 thin films produced by glancing angle deposition

et al. 2015

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“…23 Simulations of GLAD including substrate diffusion effects usually concentrate on fast rotating substrates 19,24 or stationary substrates. 25 In contrast to that, the more complex case of an intermediate substrate rotational speed with different diffusion strengths in direct comparison of experiment and simulation will be shown here.…”

Section: Introductionmentioning

confidence: 89%

Glancing angle sputter deposited nanostructures on rotating substrates: Experiments and simulations

Patzig

Karabacak

Fuhrmann

et al. 2008

Journal of Applied Physics

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Ordered arrays of Si nanorods and nanospirals have been produced by ion beam sputter glancing angle deposition of Si on rotating substrates. The substrates were prepatterned with honeycomb and hexagonal-closed-packed arranged Au dots obtained by nanosphere lithography. The effects of template type, substrate rotational speed, height of the artificial Au seeds, and deposition angle of the incident flux on the growth of the Si nanostructures is examined. Especially for the deposition of Si on honeycomb templates at different deposition angles, it is shown that the structure of the growing film changes drastically. A continuous film with honeycomblike arranged hillocks on top is deposited at normal incidence. With increased , the structure shifts to almost dense films with a mesh of hexagonally arranged pores ͑ = 70°͒. Finally, separated rodlike structures with triangular cross section are obtained under glancing angle conditions ͑ = 85°͒. In addition, the structural evolution of the glancing angle deposited Si films is compared with oblique angle deposition three-dimensional Monte Carlo simulations. Furthermore, the effects of surface diffusion on the growth of spiral Si nanostructures on nontemplated substrates in experiment and simulation are compared and discussed.

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Architecture of Thin Solid Films by the GLAD Technique

Martin¹,

Robbie²,

Carpentier³

2013

Nanomaterials and Surface Engineering

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The effect of diffusion and overhangs/vacancies on the microstructure of zig-zag thin film

Cited by 7 publications

References 11 publications

Investigation of growth and characterization of nanostructured CuIn5S8 thin films produced by glancing angle deposition

Investigation of growth and characterization of nanostructured CuIn5S8 thin films produced by glancing angle deposition

Glancing angle sputter deposited nanostructures on rotating substrates: Experiments and simulations

Architecture of Thin Solid Films by the GLAD Technique

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