Architecture of Thin Solid Films by the GLAD Technique

Martin, Nicolas; Robbie, Kevin; Carpentier, Luc

doi:10.1002/9781118618523.ch1

Cited by 4 publications

(20 citation statements)

References 80 publications

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“…Oblique deposition, sometimes referred to as glancing angle deposition (GLAD), is known as a PVD technique that leads to a film texture with low density and columnar grain growth that is elongated in the direction of the incoming flux [32]. As a result of this structure, some unique optical [33–35], electrical [36–37], mechanical [37–38] and magnetic [39] properties of thin films have been reported. By employing an ionized deposition flux (i.e., using HiPIMS in GLAD), the angular distribution of the deposited material can be influenced [40–42].…”

Section: Introductionmentioning

confidence: 99%

Oblique angle deposition of nickel thin films by high-power impulse magnetron sputtering

Hajihoseini¹,

Kateb²,

Ingvarsson³

et al. 2019

Beilstein J. Nanotechnol.

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Background: Oblique angle deposition is known for yielding the growth of columnar grains that are tilted in the direction of the deposition flux. Using this technique combined with high-power impulse magnetron sputtering (HiPIMS) can induce unique properties in ferromagnetic thin films. Earlier we have explored the properties of polycrystalline and epitaxially deposited permalloy thin films deposited under 35° tilt using HiPIMS and compared it with films deposited by dc magnetron sputtering (dcMS). The films prepared by HiPIMS present lower anisotropy and coercivity fields than films deposited with dcMS. For the epitaxial films dcMS deposition gives biaxial anisotropy while HiPIMS deposition gives a well-defined uniaxial anisotropy. Results: We report on the deposition of 50 nm polycrystalline nickel thin films by dcMS and HiPIMS while the tilt angle with respect to the substrate normal is varied from 0° to 70°. The HiPIMS-deposited films are always denser, with a smoother surface and are magnetically softer than the dcMS-deposited films under the same deposition conditions. The obliquely deposited HiPIMS films are significantly more uniform in terms of thickness. Cross-sectional SEM images reveal that the dcMS-deposited film under 70° tilt angle consists of well-defined inclined nanocolumnar grains while grains of HiPIMS-deposited films are smaller and less tilted. Both deposition methods result in in-plane isotropic magnetic behavior at small tilt angles while larger tilt angles result in uniaxial magnetic anisotropy. The transition tilt angle varies with deposition method and is measured around 35° for dcMS and 60° for HiPIMS. Conclusion: Due to the high discharge current and high ionized flux fraction, the HiPIMS process can suppress the inclined columnar growth induced by oblique angle deposition. Thus, the ferromagnetic thin films obliquely deposited by HiPIMS deposition exhibit different magnetic properties than dcMS-deposited films. The results demonstrate the potential of the HiPIMS process to tailor the material properties for some important technological applications in addition to the ability to fill high aspect ratio trenches and coating on cutting tools with complex geometries.

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Section: Introductionmentioning

confidence: 99%

Oblique angle deposition of nickel thin films by high-power impulse magnetron sputtering

Hajihoseini¹,

Kateb²,

Ingvarsson³

et al. 2019

Beilstein J. Nanotechnol.

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“…The self-shadowing process is also be responsible for producing more porous thin films, which, depending on the angle of incidence and on the material, can lead to nanostructured materials with only 10% of the bulk material's density [184]. For an inclined columnar structure, only the angle of incidence (α) must be set, but by using another rotation axis φ (perpendicular to the substrate, Figure 15a).…”

Section: Glancing Angle Deposition (Glad) To Tailor the Micro/nano Structurementioning

confidence: 99%

“…By changing the speed of rotation for φ angle, the shape of the spiral is changed, and if the speed is sufficiently high, instead of spirals, isolated columns may be produced. In this last configuration, the distance between each column will depend on the selected α angle [184] (see examples in Figure 16).…”

Section: Glancing Angle Deposition (Glad) To Tailor the Micro/nano Structurementioning

confidence: 99%

Gas Sensors Based on Localized Surface Plasmon Resonances: Synthesis of Oxide Films with Embedded Metal Nanoparticles, Theory and Simulation, and Sensitivity Enhancement Strategies

et al. 2021

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This work presents a comprehensive review on gas sensors based on localized surface plasmon resonance (LSPR) phenomenon, including the theory of LSPR, the synthesis of nanoparticle-embedded oxide thin films, and strategies to enhance the sensitivity of these optical sensors, supported by simulations of the electromagnetic properties. The LSPR phenomenon is known to be responsible for the unique colour effects observed in the ancient Roman Lycurgus Cup and at the windows of the medieval cathedrals. In both cases, the optical effects result from the interaction of the visible light (scattering and absorption) with the conduction band electrons of noble metal nanoparticles (gold, silver, and gold–silver alloys). These nanoparticles are dispersed in a dielectric matrix with a relatively high refractive index in order to push the resonance to the visible spectral range. At the same time, they have to be located at the surface to make LSPR sensitive to changes in the local dielectric environment, the property that is very attractive for sensing applications. Hence, an overview of gas sensors is presented, including electronic-nose systems, followed by a description of the surface plasmons that arise in noble metal thin films and nanoparticles. Afterwards, metal oxides are explored as robust and sensitive materials to host nanoparticles, followed by preparation methods of nanocomposite plasmonic thin films with sustainable techniques. Finally, several optical properties simulation methods are described, and the optical LSPR sensitivity of gold nanoparticles with different shapes, sensing volumes, and surroundings is calculated using the discrete dipole approximation method.

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“…Among PVD techniques, magnetron sputtering with glancing/oblique angle deposition (GLAD/OAD) allows the adjustment of conventional columnar metallic thin films, into different growth architectures (inclined columns, zig-zags, spirals, etc.) [26].…”

Section: Introductionmentioning

confidence: 99%

“…The shadows of taller columns suppress the further growth of their smaller neighbors. Eventually, some of the columns stop growing completely, being fully shadowed by their tall neighbors [26]. When the substrate holder normal axis is pointed directly at the target, an α angle of 0 • occurs.…”

Section: Introductionmentioning

confidence: 99%

Dry Electrodes for Surface Electromyography Based on Architectured Titanium Thin Films

et al. 2020

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Electrodes of silver/silver chloride (Ag/AgCl) are dominant in clinical settings for surface electromyography (sEMG) recordings. These electrodes need a conductive electrolyte gel to ensure proper performance, which dries during long-term measurements inhibiting the immediate electrode’s reuse and is often linked to skin irritation episodes. To overcome these drawbacks, a new type of dry electrodes based on architectured titanium (Ti) thin films were proposed in this work. The architectured microstructures were zigzags, obtained with different sputtering incidence angles (α), which have been shown to directly influence the films’ porosity and electrical conductivity. The electrodes were prepared using thermoplastic polyurethane (TPU) and stainless-steel (SS) substrates, and their performance was tested in male volunteers (athletes) by recording electromyography (EMG) signals, preceded by electrode-skin impedance measurements. In general, the results showed that both SS and TPU dry electrodes can be used for sEMG recordings. While SS electrodes almost match the signal quality parameters of reference electrodes of Ag/AgCl, the performance of electrodes based on TPU functionalized with a Ti thin film still requires further improvements. Noteworthy was the clear increase of the signal to noise ratios when the thin films’ microstructure evolved from normal growth towards zigzag microstructures, meaning that further tailoring of the thin film microstructure is a possible route to achieve optimized performances. Finally, the developed dry electrodes are reusable and allow for multiple EMG recordings without being replaced.

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Architecture of Thin Solid Films by the GLAD Technique

Cited by 4 publications

References 80 publications

Oblique angle deposition of nickel thin films by high-power impulse magnetron sputtering

Oblique angle deposition of nickel thin films by high-power impulse magnetron sputtering

Gas Sensors Based on Localized Surface Plasmon Resonances: Synthesis of Oxide Films with Embedded Metal Nanoparticles, Theory and Simulation, and Sensitivity Enhancement Strategies

Dry Electrodes for Surface Electromyography Based on Architectured Titanium Thin Films

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