Stressed C-V measurement was used to extract the trap profiles in AlGaN/GaN HFETs with field plates enduring high-voltage off-state stress. The C-V measurement results also correlated with the degradation in dynamic on-resistance (R DS,on ) after transistors were stressed with similar stress conditions. Based on the correlation between the trap profiles and dynamic R DS,on degradation, the location with high electric field that determines the major degradation is determined. Finally, a new source field plate is proposed and demonstrated to improve the dynamic performance degradation.