1994 IEEE MTT-S International Microwave Symposium Digest (Cat. No.94CH3389-4)
DOI: 10.1109/mwsym.1994.335175
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Temperature dependent performance of coplanar waveguide (CPW) on substrates of various materials

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Cited by 10 publications
(3 citation statements)
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“…However, silicon substrates do have slightly higher dielectric loss than traditional microwave substrates. Our experiments show that a 30,000-R-cm silicon wafer has a lower dielectric loss than a semi-insulating GaAs wafer [13]. Because the wafers are of the high-resistivity type, dc bias and high operating temperatures can increase this loss.…”
Section: Introductionmentioning
confidence: 76%
“…However, silicon substrates do have slightly higher dielectric loss than traditional microwave substrates. Our experiments show that a 30,000-R-cm silicon wafer has a lower dielectric loss than a semi-insulating GaAs wafer [13]. Because the wafers are of the high-resistivity type, dc bias and high operating temperatures can increase this loss.…”
Section: Introductionmentioning
confidence: 76%
“…This not only makes the fabrication procedure rather complicated, but also results in a deteriorated thermal performance. On the other hand, there have been reports on low-loss microwave transmission lines formed directly on high-resistivity Si substrates [5][6][7]. By adopting this technique, the fabrication procedure of Si-based submounts can be much simplified and the cost can be reduced.…”
mentioning
confidence: 99%
“…This study reports no dependency on applied DC bias on the RF characteristics of coplanar structures (CPW and meander inductor) in Schottky contact with the HR Si substrate from -50 "C to 100 "C. In this paper, we explain through semiconductor device simulations with emphasis on the CPW transmission line the reasons why the Schottky coplanar structures on HR Si substrate have no DC bias dependence on their RF characteristic The impact of Si dielectric losses on microstrip transmission lines as a function of temperature have been theoretically analyzed by upto 100 "C. Sobol [4] and Rosen [5]. Temperature effects were investigated experimentally by Taub [6] on CPW transmission line on none-commercially available HR Si with resistivities in the 30 k SZcm range which is almost an order of magnitude higher than the one under study in this paper. As previously mentioned, bias dependence experimental work has been done by Levesque [2] but this was done on microstrip transmission lines.…”
Section: Introductionmentioning
confidence: 99%